2021
DOI: 10.1016/j.sna.2021.113125
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Five-axis bimorph monolithic nanopositioning stage: Design, modeling, and characterization

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Cited by 4 publications
(1 citation statement)
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“…In addition, piezoelectric energy harvesters possess the advantages, such as high electromechanical coupling, no external voltage source requirement, and the ease of implementation in MEMS and nanosystems. Previous research included designing various devices suitable for converting ambient vibration energy into electrical power (Omidbeike et al, 2021; Rezaeisaray et al, 2015; Wang and Shi, 2017; Wang et al, 2015); developing new materials for enhancing electromechanical coupling (Mathers et al, 2009; Sorayani Bafqi et al, 2015); and optimizing energy harvesting circuits for maximum power transfer to the load (Brenes et al, 2020; Liang and Liao, 2012; Shu et al, 2007). At present, the design for optimal power according to the characteristics of environmental vibration sources and the establishment of an electromechanical coupling model of piezoelectric energy harvester are still difficult problems to be solved.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, piezoelectric energy harvesters possess the advantages, such as high electromechanical coupling, no external voltage source requirement, and the ease of implementation in MEMS and nanosystems. Previous research included designing various devices suitable for converting ambient vibration energy into electrical power (Omidbeike et al, 2021; Rezaeisaray et al, 2015; Wang and Shi, 2017; Wang et al, 2015); developing new materials for enhancing electromechanical coupling (Mathers et al, 2009; Sorayani Bafqi et al, 2015); and optimizing energy harvesting circuits for maximum power transfer to the load (Brenes et al, 2020; Liang and Liao, 2012; Shu et al, 2007). At present, the design for optimal power according to the characteristics of environmental vibration sources and the establishment of an electromechanical coupling model of piezoelectric energy harvester are still difficult problems to be solved.…”
Section: Introductionmentioning
confidence: 99%