In this paper, the open and short de-embedding structures are studied. The parallel terminal coupling effect, the loss of vias, and the interconnects are considered. On this basis, the above parasitic effects are characterized by the equivalent circuit model. To validate the model, open and short test structures are manufactured and measured. By comparing the measurement data with the modeling data, the proposed model achieves high accuracy. The rootmean-square error of scattering parameter is less than 0.0145 for the open model and less than 0.0082 for the short model.