Thermal decomposition of hexamethyldisilane (HMDS) was
studied
from room temperature to 1310 K using flash pyrolysis vacuum ultraviolet
single-photon ionization time-of-flight mass spectrometry (VUV-SPI-TOFMS).
Decomposition pathways of HMDS and initial reaction intermediates
were also investigated using density functional theory (DFT) at the
B3LYP/6-311++G(d,p) level. Unimolecular decomposition reactions of
HMDS involving Si–Si and Si–C bond cleavage, as well
as decomposition producing Me4Si and :SiMe2 via
a three-centered elimination, were determined as the initiation reactions.
Me3SiSi(Me)2
•, Me4Si, Me3Si•, and :SiMe2 were
major products of the initiation reactions. These initial products
were apt to decompose by homolytic reactions. Me2SiCH2, :SiMe2, and other silene/silylene intermediates
preferred decomposing through molecular eliminations. Both homolytic
and molecular elimination reactions are important in the pyrolysis
of HMDS.