Surface acoustic wave (SAW)-based acoustofluidic devices
have shown
broad applications in microfluidic actuation and particle/cell manipulation.
Conventional SAW acoustofluidic device fabrication generally includes
photolithography and lift-off processes and thus requires accessing
cleanroom facilities and expensive lithography equipment. In this
paper, we report a femtosecond laser direct writing mask method for
acoustofluidic device preparation. By micromachining of steel foil
to form the mask and direct evaporation of metal on the piezoelectric
substrate using the mask, the interdigital transducer (IDT) electrodes
of the SAW device are generated. The minimum spatial periodicity of
the IDT finger is about 200 μm, and the preparation for LiNbO3 and ZnO thin films and flexible PVDF SAW devices is verified.
Meanwhile, we have demonstrated various microfluidic functions, including
streaming, concentration, pumping, jumping, jetting, nebulization,
and particle alignment using the fabricated acoustofluidic (ZnO/Al
plate, LiNbO3) devices. Compared to the traditional manufacturing
process, the proposed method omits spin coating, drying, lithography,
developing, and lift-off processes and thus has advantages of simple,
convenient, low cost, and environment friendliness.