Flexible capacitive pressure sensor array using acoustic-assisted fabrication of microstructures as surface and dielectric layers

Xu, Chengyao; Mei, Deqing; Zhu, Linli; Wang, Yancheng

doi:10.1016/j.sna.2022.114006

Cited by 13 publications

(6 citation statements)

References 51 publications

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“…The heating area is a hot-air drying device (8). The winding area includes a motor (9), rotating fixture (10), winding roll (11) and its motor (12), and cross transfer device (13) and its motor (14).…”

Section: Preparation Of Scn/pa6 Nanofiber Core-coated Yarnmentioning

confidence: 99%

“…According to the sensing principle, flexible textile sensors can be divided into piezoresistive [7][8][9], piezoelectric [10,11], capacitive [12][13][14], and other types [15,16]. Capacitive sensors have the following advantages over the other types-large measuring range, high sensitivity, short dynamic response time, simple structure, and strong adaptability [17,18].…”

Section: Introductionmentioning

confidence: 99%

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Linear flexible capacitive sensor with double helix structure based on multi-needle water-bath electrospinning technology

Han¹,

Fan²,

Yue³

et al. 2023

Smart Mater. Struct.

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In this study, polyamide 6 (PA6) nanofibers were coated on the surface of a silver-coated nylon (SCN) core yarn using a novel multi-needle water-bath electrospinning method. The SCN/PA6 nanofiber core-spun yarns were prepared, and linear flexible capacitive sensors with a double helix structure (double helix structure capacitive sensors, DHSCSs) were produced by winding two nanofiber core-spun yarns in parallel, with different winding densities, on elastic rubber strings. We then characterized the nanofiber core-spun yarn, analyzed its sensing performance, and explored an application in human motion monitoring. Our results confirm that a nanofiber coating with a complete structure can be formed on the surface of the SCN core yarn by multi-needle water-bath electrospinning. The nanofiber diameter was in the 80–100 nm range, which provides a soft and deformable dielectric layer for the sensor. The capacitance of the DHSCSs gradually decreased with an increase in strain. When the strain was small, it exhibited good linearity (R2 > 0.99) and sensitivity (gauge factor of ~4). With an increase in strain, the linearity and sensitivity of the DHSCSs gradually decreased. The capacitances of the DHSCSs were stable under extended duration cyclic stretching, and their repeatability and stability were good. At different tensile speeds, the sensing performance of the DHSCSs did not change, and the capacitance change was not affected by the tensile speed. The higher winding density of the sensor made it more sensitive. The DHSCS could monitor intermittent and continuous knee bending and walking, effectively monitoring human motion in real time. This sensor has the potential for application in flexible wearable human motion, health monitoring, and other fields.

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Section: Preparation Of Scn/pa6 Nanofiber Core-coated Yarnmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Linear flexible capacitive sensor with double helix structure based on multi-needle water-bath electrospinning technology

Han¹,

Fan²,

Yue³

et al. 2023

Smart Mater. Struct.

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“…The tactile sensor serves as an essential device for precise measurement and force monitoring and has a realm of widespread application in health monitoring, robotics, and industrial automation. [1][2][3][4] An ideal tactile sensor should function similarly to biological skin that accurately detects and deciphers a range of external mechanical signals, [5,6] including pressure, [4][5][6][7]8] shear, [9,10] texture, [11,12] and vibration. [13] Among these mechanical signals, pressure and shear force are two pivotal signals that are ubiquitous in contact interactions and are of vital significance to the manipulation of robot movements.…”

Section: Introductionmentioning

confidence: 99%

An Angle‐Sensitive Microcolumn‐Based Capacitive Shear Force Sensor for Robot Grasping

Jiang,

Lv,

et al. 2024

Adv Materials Technologies

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Shear force sensors play an indispensable role in tactile perception for robot manipulation tasks. However, recent advancements in shear force sensors have been hindered by issues such as direction sensitivity and integration limitations. This paper proposes a microcolumn array dielectric layer produced using photolithography technology that enables tunability of sensor sensitivity and detection range by adjusting the aspect ratio and interval of the microstructures. Meanwhile, the impact of five constant normal force couplings on the sensitivity of shear force perception is investigated. The structure array with a 1:2 aspect ratio and 600 µm interval demonstrates an ultrahigh sensitivity of 6.189 N−1 and outstanding linearity (R2 = 0.9873) within the range up to 0.1 N. The sensor exhibits low hysteresis and robust stability over 3000 cycles. Additionally, it exhibits remarkable anisotropic direction sensitivity, enabling accurate positioning within a quarter‐circle angle. An intentionally designed orthogonal array is employed to extend the shear angle range up to 360°. Owing to the high performance of the sensor, it is further integrated onto a gripper to facilitate the grasping operation and effectively capture delicate movements. The experimental outcomes highlight that the designed sensor holds promise for applications in robotic applications and electronic skin domains.

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“…* Authors to whom any correspondence should be addressed. [1][2][3], industrial equipment [4], human-machine interfaces [5,6], wearable electronics [7], and robotics [8,9]. In recent years, studies on the operating mechanism of miniature pressure sensors have focused on piezoresistive [10][11][12][13][14][15][16], piezoelectric [17,18], resonant [19,20], fiber optic [21], and capacitive sensors [22].…”

Section: Introductionmentioning

confidence: 99%

Wide-range, durable, and adaptable miniature pressure sensor based on planar capacitance

Liu,

Yuan,

Yang

et al. 2024

Smart Mater. Struct.

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Capacitive pressure sensor (CPS) is widely used in the field of industrial equipment, because of the merits of fast dynamic response and high resolution. However, the traditional laminated CPS makes it difficult to achieve a wide detection limit in a small size, and this structure is susceptible to electromagnetic interference. Here we developed a miniature planar capacitive pressure sensor (MPCPS) with high performance, which can realize the response to external touching stimuli through the deformation of the packaging material and the change of the equivalent resistance. A metal shielding layer was added under the insulating substrate to effectively isolate the external interference. The thickness of the sensor is about 200 μm, and the diameter of the core sensing area is less than 1 mm. Two types of electrodes with different shapes were designed, among which the spiral electrode MPCPS has better performance than the linear electrode MPCPS. The spiral electrode MPCPS has a high sensitivity of 99.2% MPa-1 in the low-pressure range (0 ~ 0.1 MPa), fast response (20 ms), wide detection limit (>1 MPa), and high durability (>2000 cycles). In addition, MPCPS is proven to have good resistance to high temperature and oil contamination. Finally, practical applications such as contact pressure measuring on the meshing surface of spur gears and mechanical gripper clamping force monitoring were successfully demonstrated. These results shed light on the potential application of the MPCPS in the pressure detection of industrial equipment.

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Flexible capacitive pressure sensor array using acoustic-assisted fabrication of microstructures as surface and dielectric layers

Cited by 13 publications

References 51 publications

Linear flexible capacitive sensor with double helix structure based on multi-needle water-bath electrospinning technology

Linear flexible capacitive sensor with double helix structure based on multi-needle water-bath electrospinning technology

An Angle‐Sensitive Microcolumn‐Based Capacitive Shear Force Sensor for Robot Grasping

Wide-range, durable, and adaptable miniature pressure sensor based on planar capacitance

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