Flexible inkjet printed high-k HfO<sub>2</sub>-based MIM capacitors

Vescio, Giovanni; López-Vidrier, J.; Leghrib, Radouane; Cornet, A.; Cirera, A.

doi:10.1039/c5tc03307a

Cited by 49 publications

(33 citation statements)

References 69 publications

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“…This was also the first report demonstrating feasibility of bar coating technique for the fabrication of high quality uniform oxide dielectric with extraordinary dielectric performance. Besides these noteworthy achievements, many other studies have investigated solution processed high κ oxide dielectrics using printing techniques …”

Section: Recent Achievements Of Oxide High κ Dielectrics Using Solutimentioning

confidence: 99%

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

et al. 2018

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The electronic functionalities of metal oxides comprise conductors, semiconductors, and insulators. Metal oxides have attracted great interest for construction of large-area electronics, particularly thin-film transistors (TFTs), for their high optical transparency, excellent chemical and thermal stability, and mechanical tolerance. High-permittivity (κ) oxide dielectrics are a key component for achieving low-voltage and high-performance TFTs. With the expanding integration of complementary metal oxide semiconductor transistors, the replacement of SiO with high-κ oxide dielectrics has become urgently required, because their provided thicker layers suppress quantum mechanical tunneling. Toward low-cost devices, tremendous efforts have been devoted to vacuum-free, solution processable fabrication, such as spin coating, spray pyrolysis, and printing techniques. This review focuses on recent progress in solution processed high-κ oxide dielectrics and their applications to emerging TFTs. First, the history, basics, theories, and leakage current mechanisms of high-κ oxide dielectrics are presented, and the underlying mechanism for mobility enhancement over conventional SiO is outlined. Recent achievements of solution-processed high-κ oxide materials and their applications in TFTs are summarized and traditional coating methods and emerging printing techniques are introduced. Finally, low temperature approaches, e.g., ecofriendly water-induced, self-combustion reaction, and energy-assisted post treatments, for the realization of flexible electronics and circuits are discussed.

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Section: Recent Achievements Of Oxide High κ Dielectrics Using Solutimentioning

confidence: 99%

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

et al. 2018

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“…We have optimized the ink properties based on existing formulations, which dictate that an ideal ink for a DOD system should have a particle size less than 100 times the nozzle diameter, viscosity and surface tension in the range of 2-20 mPa s and 30-60 mN m À1 respectively. 42,43 2 Materials and methods…”

Section: Introductionmentioning

confidence: 99%

Top-down synthesis of zinc oxide based inks for inkjet printing

2017

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“…[457,458] Furthermore, PMMA/BaTiO 3 nanoparticles inks have been assembled into dielectric films using inkjet printing, [411] screen printing, [260] and gravure printing [259] for SWCNT FETs. [459] A new synthesis method has recently been developed that produces ≈5 nm HfO 2 nanoparticles, [460] which may further improve the quality of HfO 2based printed dielectrics. The dielectric constant of printed PMMA/BaTiO 3 is ≈17 at a thickness of 1.5 μm, which corresponds to an average areal capacitance of 10.8 nF cm −2 .…”

Section: High-κ Nanoparticle Inks For Gate Dielectricsmentioning

confidence: 99%

“…For example, inks containing 50 wt% 25 nm-diameter HfO 2 nanoparticles have been inkjet printed, resulting in di electric thin films with κ = 12.6. [459] A new synthesis method has recently been developed that produces ≈5 nm HfO 2 nanoparticles, [460] which may further improve the quality of HfO 2based printed dielectrics.…”

Section: High-κ Nanoparticle Inks For Gate Dielectricsmentioning

confidence: 99%

Assembly and Electronic Applications of Colloidal Nanomaterials

2016

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Artificial solids and thin films assembled from colloidal nanomaterials give rise to versatile properties that can be exploited in a range of technologies. In particular, solution-based processes allow for the large-scale and low-cost production of nanoelectronics on rigid or mechanically flexible substrates. To achieve this goal, several processing steps require careful consideration, including nanomaterial synthesis or exfoliation, purification, separation, assembly, hybrid integration, and device testing. Using a ubiquitous electronic device - the field-effect transistor - as a platform, colloidal nanomaterials in three electronic material categories are reviewed systematically: semiconductors, conductors, and dielectrics. The resulting comparative analysis reveals promising opportunities and remaining challenges for colloidal nanomaterials in electronic applications, thereby providing a roadmap for future research and development.

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Flexible inkjet printed high-k HfO₂-based MIM capacitors

Abstract: The soaring global demand for flexible, wearable and transparent devices has created an urgent need for new fabrication technologies that are both cost-competitive and eco-friendly.

Cited by 49 publications

References 69 publications

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

Top-down synthesis of zinc oxide based inks for inkjet printing

Assembly and Electronic Applications of Colloidal Nanomaterials

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Flexible inkjet printed high-k HfO2-based MIM capacitors

Abstract: The soaring global demand for flexible, wearable and transparent devices has created an urgent need for new fabrication technologies that are both cost-competitive and eco-friendly.

Cited by 49 publications

References 69 publications

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

Top-down synthesis of zinc oxide based inks for inkjet printing

Assembly and Electronic Applications of Colloidal Nanomaterials

Contact Info

Product

Resources

About

Flexible inkjet printed high-k HfO₂-based MIM capacitors