Flexible Mini‐Inductors with Ultra‐High Inductance Density Directly Cut from Soft Magnetic Amorphous Alloys by Femtosecond Laser

Abstract

Inductors are indispensable parts in power modules of electronic devices. With the rapid development of flexible and wearable electronic devices, developing flexible micro‐inductors with large energy storage has become an urgent task. In this research, a sophisticated femtosecond laser ablation technique is employed to craft circular spiral mini‐inductors via selective etching of soft magnetic amorphous alloy ribbons. Remarkably, while these inductors possess dimensions akin to human fingerprints, they demonstrate an impressively elevated inductance value of ≈1.15 µH at 1 MHz. The inductance density is ≈280–390 nH mm−2, which is ≈10 times larger than conventional circular spiral inductors and is attributed to the high permeability of the amorphous alloys. Furthermore, the inductors showcase commendable flexibility, marked by stellar elasticity and a bending endurance exceeding 2500 cycles, thanks to the amorphous alloys' superior elastic strain limit. When integrated with an LM2576‐3.3BT buck converter, the fabricated inductor achieved a peak power conversion efficiency nearing 70%. These findings underscore the potential of such flexible mini‐inductors in the landscape of flexible electronics.