Flexible, non-contact and high-precision measurements of optical components

Beutler, Andreas S.

doi:10.1088/2051-672x/4/2/024011

Cited by 14 publications

(9 citation statements)

References 8 publications

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“…In addition to the linear scans, circular scans can also be performed describing the whole topography of the lens. Other commercially available cylindrical coordinate measuring instruments make use of an optical probe [15][16][17][18][19][20]. This prevents the surface from being damaged.…”

Section: D Pointwise Measuring Instrumentsmentioning

confidence: 99%

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Metrology for the production process of aspheric lenses

Beutler¹

2016

Advanced Optical Technologies

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Metrology revealing the form deviation of an aspheric surface is a fundamental part of all different production processes of aspheric lenses. Different processing steps have different requirements for the production. A selection of measuring instruments commonly applied in these processes is presented. This contains tactile and optical pointwise measuring instruments and laser interferometer systems. The principle functionality and the properties are presented. An overview of the application of these systems in different production processes is given. In order to show comparability, measuring results of the different types of systems are presented.

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Section: D Pointwise Measuring Instrumentsmentioning

confidence: 99%

“…The measuring systems developed for high-accuracy applications [15][16][17] utilize an internal compensation system. It consists of sensors measuring distance changes to a reference metrology frame.…”

Section: D Pointwise Measuring Instrumentsmentioning

confidence: 99%

Metrology for the production process of aspheric lenses

Beutler¹

2016

Advanced Optical Technologies

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“…MarForm MFU200 (Mahr GmbH, Germany) [33] and LuphoScan (Taylor Hobson, UK) [34] are point-based sensors where the optical probe can be placed normal to the surface by means of two linear and one rotary stages. The sensor can measure rotationally symmetric surfaces with high accuracy.…”

Section: Introductionmentioning

confidence: 99%

Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics

Burada

Pant

Mishra

et al. 2019

Advanced Optical Technologies

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The applications of freeform optical surfaces in modern optical systems are providing unique solutions over rotationally symmetric surfaces. These surfaces offer higher degrees of freedom to the designer to enhance the high-end performance of the optical system. The precise metrology of freeform optics is one of the major bottlenecks for its use in imaging applications. Modern optical fabrication methods (i.e. fast or slow tool servo configuration) are, in principle, capable to meet the challenges to generate complex freeform surfaces if supported by precise metrology feedback for error compensation. In the present work, we have developed a Shack-Hartmann sensor-based metrology technique that can be used for quantitative in situ measurement of freeform optics. The sensor head is used to measure freeform optics in the reflection mode by following the CNC tool path in the offline mode. The measurements are used as feedback for corrective machining. Quantitative analysis is also performed to estimate the error budget of the metrology system. Further, the proposed in situ metrology scheme is validated by measuring freeform surface using a coherence correlation interferometric optical profiler.

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“…Commercially available surface profile measurement instruments, such as scanning electron microscopes (SEMs), optical profilers, and atomic force microscopes (AFMs), encounter unsolvable difficulties in the surface profile measurement of microstructures [15][16][17][18][19][20][21]. For instance, SEMs can carry out fast measurements with a high horizontal resolution of up to nanometers [17,18,22].…”

Section: Introductionmentioning

confidence: 99%

“…Fang et al, Chen et al, and Ju et al proposed the sample tilting method for profile measurement of microstructured surfaces using a stylus-based profiler [7,31,32]. Schuler et al and Beutler also proposed a profile measurement method by tilting the sensor heads [14,15]. The above approaches focused on employing a high-precision hardware, which is expensive and technologically unviable.…”

Section: Introductionmentioning

confidence: 99%

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Yin

et al. 2018

Journal of Nanomaterials

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Microstructure-based function components are widely used in precision engineering. Surface profile measurement is an essential tool to verify the manufacturing quality of microstructures and to enhance the working performance of the device employing microstructures as function components. However, highly accurate surface profile measurements are difficult to perform for microstructures owing to their complex surface topographies. In this paper, a measurement system is proposed for the surface profile measurement of microstructures. The main components of the measurement system are a precision displacement stage to move the workpiece, a homemade probing system with a diamond microstylus to sense the surface profile variation of the microstructures on the workpiece, and a vibration isolation table to reduce the disturbance of the measurement environment. In addition, the stability of the measurement was experimentally investigated. Microstructures with shape of equilateral right triangle were employed as the measurement specimen, and the surface profile of triangular microstructures was measured by employing two methods to correct errors caused by the specimen inclination and the radius of the stylus tip. The shape, depth, and period of the measured microstructures were also detected based on the results of the surface profile measurement. Experimental results demonstrate the feasibility of the proposed surface profile measurement for microstructures with complex surface topographies.

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Flexible, non-contact and high-precision measurements of optical components

Cited by 14 publications

References 8 publications

Metrology for the production process of aspheric lenses

Metrology for the production process of aspheric lenses

Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

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