2012
DOI: 10.1016/j.proeng.2012.09.127
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Flexible PCB-MEMS Flow Sensor

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Cited by 36 publications
(12 citation statements)
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“…The hot-film flowmeter consists of a thin-film resistive heater that dissipates heat to the surrounded fluid. The fluid flow rate is directly proportional to the sensor heat loss that can be detected by the change in the film resistance [ 109 ], or voltage change [ 110 ], or the required power to keep the heater constant at a specific temperature [ 111 , 112 ]. The calorimetric flow sensor involves a thin film heater located between a minimum of two thermal sensors.…”
Section: Pipes Flow Sensorsmentioning
confidence: 99%
“…The hot-film flowmeter consists of a thin-film resistive heater that dissipates heat to the surrounded fluid. The fluid flow rate is directly proportional to the sensor heat loss that can be detected by the change in the film resistance [ 109 ], or voltage change [ 110 ], or the required power to keep the heater constant at a specific temperature [ 111 , 112 ]. The calorimetric flow sensor involves a thin film heater located between a minimum of two thermal sensors.…”
Section: Pipes Flow Sensorsmentioning
confidence: 99%
“…With the development of flexible electronics, several flexible flow sensors have been reported in recent years [ 20 ]. Petropoulos A. et al developed a flexible gas flow sensor which was fabricated on a flexible PCB substrate and was able to quantify 0–10 SLPM flow rate [ 21 ]. Sturm H. et al , developed a thermoelectric mass flow-rate sensor on a 10 μm thick polyimide foil [ 22 ].…”
Section: System Designmentioning
confidence: 99%
“…However, they are fragile, and the technology is relatively costly. In an attempt to use the same basic operation principle, but more robust designs, thin flexible PCB carriers were used as technological basis [6,7]. The sensors considered in this paper are based completely on standard flexible PCB technology and are optimized for the use in HVAC systems [8].…”
Section: Flow Sensorsmentioning
confidence: 99%