Flexible picosecond probing of integrated circuits with chopped electron beams

Winkler, D.; Schmitt, R.; Brünner, Matthias; Lischke, B.

doi:10.1147/rd.342.0189

Cited by 22 publications

(7 citation statements)

References 20 publications

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“…− ωt cos 2φ 0 + (1 − cos(2φ 0 + ωt)) sin ωt 4 (28) in which we have assumed ∆γ γ0 1, and have omitted terms proportional to ωc ω 3 and higher, based on assumption (13). Figure 4b shows the resulting deviation in longitudinal position relative to the moving frame.…”

Section: Longitudinal Trajectories Of the Bunch Centermentioning

confidence: 99%

“…This results in lengthy expressions for v (2) (t) and r (2) (t) with many cross-terms of the various initial particle coordinates x i . However because of assumptions (13) and (15), only effects that are linearly dependent on initial particle coordinates x i and up to second order in ωc ω are taken into account. This allows the definition of the optical transfer matrix M cav via…”

Section: Optical Transfer Matrixmentioning

confidence: 99%

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Theory and particle tracking simulations of a resonant radiofrequency deflection cavity in TM 110 mode for ultrafast electron microscopy

Rens¹,

Verhoeven²,

Franssen³

et al. 2018

Ultramicroscopy

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We present a theoretical description of resonant radiofrequency (RF) deflecting cavities in TM 110 mode as dynamic optical elements for ultrafast electron microscopy. We first derive the optical transfer matrix of an ideal pillbox cavity and use a Courant-Snyder formalism to calculate the 6D phase space propagation of a Gaussian electron distribution through the cavity. We derive closed, analytic expressions for the increase in transverse emittance and energy spread of the electron distribution. We demonstrate that for the special case of a beam focused in the center of the cavity, the low emittance and low energy spread of a high quality beam can be maintained, which allows high-repetition rate, ultrafast electron microscopy with 100 fs temporal resolution combined with the atomic resolution of a high-end TEM. This is confirmed by charged particle tracking simulations using a realistic cavity geometry, including fringe fields at the cavity entrance and exit apertures.

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Section: Longitudinal Trajectories Of the Bunch Centermentioning

confidence: 99%

Section: Optical Transfer Matrixmentioning

confidence: 99%

Theory and particle tracking simulations of a resonant radiofrequency deflection cavity in TM 110 mode for ultrafast electron microscopy

Rens¹,

Verhoeven²,

Franssen³

et al. 2018

Ultramicroscopy

View full text Add to dashboard Cite

show abstract

“…Commercial electron-beam testers have achieved a 100-ps rise-time/fall-time resolution with as little as 10 ps jitter [19], and a 7-ps time resolution was recently demonstrated in an experimental setup [20]. Although high-speed electrostatic deflectors are commonly used for beam blanking, they present several practical difficulties: 1) It is a challenge to efficiently generate picosecond electron pulses of large enough amplitude.…”

Section: Conventional Voltage-contrast Techniquesmentioning

confidence: 99%

Picosecond photoelectron microscope for high-speed testing of integrated circuits

et al. 1990

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The performance of devices and circuits is advancing at a rapid pace with the advent of submicron design ground niles and switching times under SO ps. The requirements for probing the internal nodes of these ultra-fast, -small, and -dense circuits give rise to great challenges for high-speed electron-beam testing. In this paper, we review the steps which have allowed electron-beam testing to achieve simultaneously 5-ps temporal resolution, O.i-fim spot size, and 3 mV/VHz voltage sensitivity. The resulting newly developed instrument, called the picosecond photoelectron scanning electron microscope (PPSEM), is capable of measuring the state-of-the-art bipolar and FET circuits and also VLSI passive interconnects. ^Copyright 1990 by International Business Machines Corporation. Copying in printed form for private use is permitted without payment of royalty provided that (I) each reproduction is done without alteration and (2) the Journal reference and IBM copyright notice are included on the first page. The title and abstract, but no other portions, of this paper may be copied or distributed royalty free without further permission by computer-based and other information-service systems. Permission to republish any other portion of this paper must be obtained from the Editor.

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“…Indeed, the first time-resolved cathodoluminescence study in an SEM was performed in the 80's. Christen and others [22][23][24] , used a blanking scheme where the electron beam was swept over an aperture [25][26][27] . Despite a long pulse (> 100 ns) the sharp falling edge (< 1 ns) resulted in a sub-nanosecond resolution but at the expense of a limited spatial resolution (> 1 μm).…”

mentioning

confidence: 99%

Time-resolved cathodoluminescence in an ultrafast transmission electron microscope

Meuret

Tizei

Houdellier

et al. 2021

Applied Physics Letters

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Ultrafast transmission electron microscopy (UTEM) combines sub-picosecond time-resolution with the versatility of TEM spectroscopies. It allows to study the ultrafast materials response using complementary techniques. However, until now, time-resolved cathodoluminescence was unavailable in a UTEM. In this paper we report time-resolved cathodoluminescence measurements in an ultrafast transmission electron microscope. We mapped the spatial variations of the emission dynamics from nano-diamonds with a high density of NV centers, with a 12 nm spatial resolution and sub-nanosecond temporal resolution. This development will allow to study the emission dynamics from quantum emitters with a unique spatiotemporal resolution and benefit from the wealth of complementary signals provided by transmission electron microscopes. It will further expand the possibilities of ultrafast Transmission Electron Microscopes paving the way to the investigation of the quantum aspects of electron/sample interaction.Excited states in atomic, molecular or solid-state systems can decay through a great variety of nonradiative or radiative relaxation channels. Light emission, also called luminescence, associated with radiative pathways contains invaluable information on the properties of these systems and their dynamics. Measuring the lifetime of an excited state is therefore essential to understand complex relaxation pathways. The study of light emission has motivated over the course of history a large number of major instrumental developments. The developed techniques have long relied on optical excitation of the sample 1-7

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Flexible picosecond probing of integrated circuits with chopped electron beams

Cited by 22 publications

References 20 publications

Theory and particle tracking simulations of a resonant radiofrequency deflection cavity in TM 110 mode for ultrafast electron microscopy

Theory and particle tracking simulations of a resonant radiofrequency deflection cavity in TM 110 mode for ultrafast electron microscopy

Picosecond photoelectron microscope for high-speed testing of integrated circuits

Time-resolved cathodoluminescence in an ultrafast transmission electron microscope

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