Flexible platinum nanoparticle strain sensors

Skotadis, Evangelos; Mousadakos, D.; Tanner, J.; Tsoukalas, D.; Broutas, Panagiotis

doi:10.1109/essderc.2013.6818891

Cited by 3 publications

(5 citation statements)

References 19 publications

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“…Strain sensors are based on a PtNP film deposited by DC magnetron sputtering and inert gas condensation methods [8,9] on top of a SiO 2 substrate previously patterned with interdigitated gold electrodes (IDEs) using the following fabrication steps. An n-type Si wafer of 1-10 Ω•cm resistivity was Piranha cleaned and then oxidized, resulting in a 1 μm SiO 2 layer.…”

Section: Sensor Fabrication and Measurementsmentioning

confidence: 99%

“…Well-established technologies include metalfoil and semiconductor strain sensors [1,2]. The growing need for miniaturized electronic devices as strain sensors with increased sensitivity for everyday applications for the detection of very small deformations has driven the development of metallic nanoparticle (NP)-based strain sensors [3][4][5][6][7][8][9][10][11]. Metallic NP thin films on flexible substrates have been found to be highly sensitive to substrate deformation, and exhibit a gauge factor that is significantly higher than commercial metal-foil strain gauges [3,4,8,9]; this is due to the dependence of electric current transport on the tunneling effect between neighboring NPs.…”

Section: Introductionmentioning

confidence: 99%

“…The growing need for miniaturized electronic devices as strain sensors with increased sensitivity for everyday applications for the detection of very small deformations has driven the development of metallic nanoparticle (NP)-based strain sensors [3][4][5][6][7][8][9][10][11]. Metallic NP thin films on flexible substrates have been found to be highly sensitive to substrate deformation, and exhibit a gauge factor that is significantly higher than commercial metal-foil strain gauges [3,4,8,9]; this is due to the dependence of electric current transport on the tunneling effect between neighboring NPs. The NP surface, however, is very sensitive to other environmental factors such as temperature, humidity or gaseous analytes [12][13][14][15][16][17][18][19][20][21][22], and these factors affect sensor performance and cause degradation [18].…”

Section: Introductionmentioning

confidence: 99%

“…In previous works [8,9], our group has studied the strain sensitivity of dense Pt nanoparticle (PtNP) films formed in vacuum by DC sputtering and gas condensation on rigid as well as flexible substrates, demonstrating a strain gauge device with satisfactory sensitivity. The present paper mainly focuses on an optimization study regarding Al 2 O 3 growth parameters in terms of humidity protection for PtNP-based strain sensors and the effect on their performance.…”

Section: Introductionmentioning

confidence: 99%

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Atomic layer deposited Al₂O₃ thin films as humidity barrier coatings for nanoparticle-based strain sensors

et al. 2018

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AlO thin films deposited by atomic layer deposition on Pt nanoparticle-based strain sensors were studied as humidity barrier coatings for sensor protection. The effect of two deposition parameters-film thickness and growth temperature-is discussed in relation to an AlO coating's ability to isolate the nanoparticle surface and protect strain sensitivity from humidity variations. It is shown that transmission electron microscopy images cannot confirm the effective protection of a nanoparticle surface, thus x-ray photoelectron spectroscopy and electrical measurements have been employed. The existence of a critical thickness of the AlO protective film above which resistance and gauge factor variations are suppressed during humidity change was observed at different deposition temperatures. This ability is linked with the existence of incorporated pinholes and intrinsic hydroxyl groups in the AlO thin film, which are responsible for humidity transport through the oxide.

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Section: Sensor Fabrication and Measurementsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Atomic layer deposited Al₂O₃ thin films as humidity barrier coatings for nanoparticle-based strain sensors

et al. 2018

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“…We can refer to carbon powder [21][22][23][24], ink [25], particles [26], nanoparticles [21,27], nanotubes [28], or carbon's allotropic form as a graphite [29,30]. Transition metals can be used too, such as silver [31][32][33][34][35], copper [29], nickel [36], platinum [37], and palladium [38]. Others are electro-conductive rubber [39], carbon-loaded rubber [40], and some conductive polymers such as the ionic metal composite (IPMC) [41], and Poly (3,4-ethylenedioxythiophene) (or PEDOT or sometimes PEDT) [42], whose poor solubility can be partly circumvented with the PEDOT:PSS composite (figure 4) [43].…”

Section: Conductive Componentmentioning

confidence: 99%

Resistive flex sensors: a survey

Saggio

Riillo

Sbernini

et al. 2015

Smart Mater. Struct.

140

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Resistive flex sensors can be used to measure bending or flexing with relatively little effort and a relativelylow budget. Their lightness, compactness, robustness, measurement effectiveness and low power consumption make these sensors useful for manifold applications in diverse fields.Here, we provide a comprehensive survey of resistive flex sensors, taking into account their working principles, manufacturing aspects, electrical characteristics and equivalent models, useful front-end conditioning circuitry, and physic-bio-chemical aspects. Particular effort is devoted to reporting on and analyzing several applications of resistive flex sensors, related to the measurement of body position and motion, and to the implementation of artificial devices. In relation to the human body, we consider the utilization of resistive flex sensors for the measurement of physical activity and for the development of interaction/interface devices driven by human gestures. Concerning artificial devices, we deal with applications related to the automotive field, robots, orthosis and prosthesis, musical instruments and measuring tools. The presented literature is collected from different sources, including bibliographic databases, company press releases, patents, master's theses and PhD theses.

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Radiophysical methods in the study of physicochemical properties of liquids

2020

Visnyk of V.N. Karazin Kharkiv National University, Series “Radio Physics and Electronics”

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Relevance: The creation of new express methods for the qualitative and quantitative analysis of solutions and suspensions and biological liquids, as well as the development of technical means for their implementation, are urgent tasks in various fields of science and technology, in particular, in biotechnology and biomedicine. Also, the relevance of the work is due to the need to optimize technological processes for the production and synthesis of nanomaterials. The purpose of the work is to verify theoretically and experimentally the possibility of using radiophysical methods to assess the physicochemical parameters of solutions and suspensions. Another purposes are optimization of the technological process of laser ablation and solution of the physicochemical problem of the synthesis of iron nanoparticles in magnetite shells. Materials and methods: The paper presents a comparative analysis of methods for calculating the effective parameters of the system dielectric – metal inclusions using the mixing formulas of Maxwell–Garnett, Bruggeman and the finite element method. It is shown that in the case of metallic inclusions, the Bruggeman formula gives a more adequate result, which is consistent with the experimental results. The analysis of aqueous suspensions of metal nanoparticles was carried out by the method of impedance spectroscopy. Results: A simple method has been developed for the synthesis of iron nanoparticles with a magnetite shell based on the reaction of controlled oxidation of iron nanoparticles by ozone. A microscopic analysis of the obtained particles was carried out and the rate of formation of the magnetic shell was determined. The method of impedance spectroscopy for measuring the concentration of metal nanoparticles in the process of laser ablation has been tested. It is shown that the state of sedimentation equilibrium of the suspension corresponds to a specific value of electrical conductivity. Conclusion: It is shown that the method of impedance spectroscopy can be used as an indirect method for assessing the qualitative and quantitative physicochemical parameters of solutions and suspensions. The simulation of the influence of the distribution of metal particles in a dielectric matrix on the electrophysical parameters of the suspension is carried out.

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Flexible platinum nanoparticle strain sensors

Cited by 3 publications

References 19 publications

Atomic layer deposited Al₂O₃ thin films as humidity barrier coatings for nanoparticle-based strain sensors

Atomic layer deposited Al₂O₃ thin films as humidity barrier coatings for nanoparticle-based strain sensors

Resistive flex sensors: a survey

Radiophysical methods in the study of physicochemical properties of liquids

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Flexible platinum nanoparticle strain sensors

Cited by 3 publications

References 19 publications

Atomic layer deposited Al2O3 thin films as humidity barrier coatings for nanoparticle-based strain sensors

Atomic layer deposited Al2O3 thin films as humidity barrier coatings for nanoparticle-based strain sensors

Resistive flex sensors: a survey

Radiophysical methods in the study of physicochemical properties of liquids

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Atomic layer deposited Al₂O₃ thin films as humidity barrier coatings for nanoparticle-based strain sensors

Atomic layer deposited Al₂O₃ thin films as humidity barrier coatings for nanoparticle-based strain sensors