Flexible strain sensors with high performance based on metallic glass thin film

Abstract

Searching strain sensitive materials for electronic skin is of crucial significance because of the restrictions of current materials such as poor electrical conductivity, large energy consumption, complex manufacturing process, and high cost. Here, we report a flexible strain sensor based on the Zr 55 Cu 30 Ni 5 Al 10 metallic glass thin film which we name metallic glass skin. The metallic glass skin, synthesized by ion beam deposition, exhibits piezoresistance effects with a gauge factor of around 2.86, a large detectable strain range ($1% or 180 bending angle), and good conductivity. Compared to other e-skin materials, the temperature coefficient of resistance of the metallic glass skin is extremely low (9.04 Â 10 À6 K À1), which is essential for the reduction in thermal drift. In addition, the metallic glass skin exhibits distinct antibacterial behavior desired for medical applications, also excellent reproducibility and repeatability (over 1000 times), nearly perfect linearity, low manufacturing cost, and negligible energy consumption, all of which are required for electronic skin for practical applications.

Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film

“…prevention, 1,2 and thus has received extensive attention. This great demand inspires growing research enthusiasm for the development of robust, high sensitivity, and wide range strain sensor technology in scientific circles and industry.…”

Metallic Glass Structures for Mechanical-Energy-Dissipation Purpose: A Review

“…However, how to use the kirigami structures to develop optoelectronic devices or wearing devices is still challenging. Because of the unique properties, it is expected more functional devices using MGs will be developed in future, such as large elasticity, light weight, wearable sensors and optoelectronic devices [19,89,91].…”

“…The stretchable kirigami MG structures are useful for developing mechanical meta-materials and optoelectronic devices with extended cycle life. For example, Xian et al have reported some MG film skins with a piezoresistance effect, large strain range and good conductivity [91]. The use of kirigami structures to develop electronic skins may further enhance the stretchability for wearable devices.…”

“…conductivity [91]. The use of kirigami structures to develop electronic skins may further enhance the stretchability for wearable devices.…”

“…Adapted from [89] with copyright permission from Elsevier, 2017. Metals 2018, 8, x FOR PEER REVIEW 10 of 15conductivity[91]. The use of kirigami structures to develop electronic skins may further enhance the stretchability for wearable devices.…”