Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

Zhou, Jian; Dong, Shurong; Jin, Hao; Feng, Bing; Wang, Demiao

doi:10.1155/2012/610160

Cited by 11 publications

(5 citation statements)

References 12 publications

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“…At present, there are many theoretical and experimental studies using AlN SAWs and film bulk acoustic wave resonators for sensing applications (Hou et al 2012;Zhou et al 2012;Fu et al 2010b); however, little information is available on the microfluidic performance of the AlNbased SAW devices. This work demonstrates, for the first time, the microfluidic performance (including streaming, pumping, jetting and nebulization as illustrated in Fig.…”

Section: Introductionmentioning

confidence: 99%

Discrete microfluidics based on aluminum nitride surface acoustic wave devices

Zhou

Pang

Garcia‐Gancedo

et al. 2014

Microfluid Nanofluid

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To date, most surface acoustic wave (SAW) devices have been made from bulk piezoelectric materials, such as quartz, lithium niobate or lithium tantalite. These bulk materials are brittle, less easily integrated with electronics for control and signal processing, and difficult to realize multiple wave modes or apply complex electrode designs. Using thin film SAWs makes it convenient to integrate microelectronics and multiple sensing or microfluidics techniques into a lab-on-a-chip with low cost and multi-functions on various substrates (silicon, glass or polymer). In the work, aluminum nitride (AlN)-based SAW devices were fabricated and characterized for discrete microfluidic (or droplet based) applications. AlN films with a highly c-axis texture were deposited on silicon substrates using a magnetron sputtering system. The fabricated AlN/ Si SAW devices had a Rayleigh wave mode at a frequency of 80.3 MHz (with an electromechanical coupling coefficient k 2 of 0.24 % and phase velocity v p of 5,139 m/s) and a higher-frequency-guided wave mode at 157.3 MHz (with a k 2 value of 0.22 % and v p of 10,067 m/s). Both modes present a large out of band rejection of *15 dB and were successfully applied for microfluidic manipulation of liquid droplets, including internal streaming, pumping and jetting/ nebulization, and their performance differences for microfluidic functions were discussed. A detailed investigation of the influences of droplet size (ranging from 3 to 15 lL) and RF input power (0.25-68 W) on microdroplet behavior has been conducted. Results showed that pumping and jetting velocities were increased with an increase of RF power or a decrease in droplet size.

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Section: Introductionmentioning

confidence: 99%

Discrete microfluidics based on aluminum nitride surface acoustic wave devices

Zhou

Pang

Garcia‐Gancedo

et al. 2014

Microfluid Nanofluid

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“…37 They further fabricated AlN-based flexible SAW devices on PI substrate, with lamb waves and acoustic wave velocities up to 900010000 m/s. 67 Lamanna et al fabricated flexible and transparent AlN-based SAW devices on a PEN substrate using sputtering deposition. A large transmission-signal amplitude, up to ~20 dB, was achieved for the Lamb mode SAWs with an acoustic velocity of ~10,500 m s −1 .…”

Section: Aln Piezoelectric Filmmentioning

confidence: 99%

Flexible and wearable acoustic wave technologies

Zhou

Guo

Yong

et al. 2023

Applied Physics Reviews

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Flexible and wearable acoustic wave technology has recently attracted tremendous attention due to their wide-range applications in wearable electronics, sensing, acoustofluidics, and lab-on-a-chip, attributed to its advantages such as low power consumption, small size, easy fabrication, and passive/wireless capabilities. Great effort has recently been made in technology development, fabrication, and characterization of rationally designed structures for next-generation acoustic wave based flexible electronics. Herein, advances in fundamental principles, design, fabrication, and applications of flexible and wearable acoustic wave devices are reviewed. Challenges in material selections (including both flexible substrate and piezoelectric film) and structural designs for high-performance flexible and wearable acoustic wave devices are discussed. Recent advances in fabrication strategies, wave mode theory, working mechanisms, bending behavior, and performance/evaluation are reviewed. Key applications in wearable and flexible sensors and acoustofluidics, as well as lab-on-a-chip systems, are discussed. Finally, major challenges and future perspectives in this field are highlighted.

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“…[79][80][81] In particular, Algieri et al reported deposition of a columnar of 0002-oriented AlN with a minimum RMS 6.32 nm on an area of 5 × 5 μm and a d 33 of 4.93 pm V −1 . [81] The first report of the SAW device based on PI/AlN was developed by Zhou et al [82] with a low transmission amplitude (<1db). Li et al recently developed a SAW device with AlN working at 4.95 GHz, improving the piezoelectric response (8.01 pm V −1 ) and reducing the roughness (3.2 nm) by adding a molybdenum interlayer of 200 nm.…”

Section: Processing Of Piezoelectric Materials For Polymeric Saw Devicesmentioning

confidence: 99%

Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

Lamanna

2023

Adv Materials Technologies

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Recently, there has been a remarkable increase in interest in piezoelectric thin films, particularly zinc oxide (ZnO) and aluminum nitride (AlN), deposited on flexible polymeric substrates. This is due to the rapid expansion of fields such as robotics, wearable devices, and the Internet of Things (IoT). These thin‐film layered structures have a wide range of applications, such as energy harvesting, sensing and biosensing, microfluidic sorting, pumping and mixing, and telecommunications. One of the most promising platforms is piezoelectric acoustic‐based thin‐film devices on inexpensive, recyclable, or disposable polymeric substrates. Their reliability, reproducibility, conformability, small size, and wireless control capabilities make them a leading candidate for the development of new wireless, fully automated, and digitized microsystems for IoT and wearable devices. This review examines recent advancements in the engineering of ZnO and AlN thin films on polymeric, flexible, and conformable surface acoustic wave (SAW) devices. Topics covered include the materials used, piezoelectric film deposition, device fabrication, and the latest applications of this technology as sensors and actuators.

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Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

Cited by 11 publications

References 12 publications

Discrete microfluidics based on aluminum nitride surface acoustic wave devices

Discrete microfluidics based on aluminum nitride surface acoustic wave devices

Flexible and wearable acoustic wave technologies

Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

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