2004
DOI: 10.1117/12.545952
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Flip-chip assembly for photonic circuits

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Cited by 3 publications
(3 citation statements)
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“…However, thermo-compression is also not an ideal solution, because it suffers from poorer chip-to-chip alignment tolerances than solder-reflow, and is a more complicated process to implement. Several solutions for flux-free solder-reflow bonding have been proposed, including (i) laser induced flipchip bonding using an In and Ag nano-particle based ink [14], (ii) Au-Sn solder which is relatively free from oxidation [9], (iii) wafer-level bonding in a vacuum chamber [15], and (iv) solderreflow in a forming-gas (i.e., H 2 buffered in N 2 ) to help decompose the oxides [16]. These novel approaches have not been widely implemented, because they are difficult to merge with established industrial flip-chip bonding production-lines, and require relatively costly modifications to the manufacturing infrastructure.…”
Section: Electronic-photonic Integrationmentioning
confidence: 99%
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“…However, thermo-compression is also not an ideal solution, because it suffers from poorer chip-to-chip alignment tolerances than solder-reflow, and is a more complicated process to implement. Several solutions for flux-free solder-reflow bonding have been proposed, including (i) laser induced flipchip bonding using an In and Ag nano-particle based ink [14], (ii) Au-Sn solder which is relatively free from oxidation [9], (iii) wafer-level bonding in a vacuum chamber [15], and (iv) solderreflow in a forming-gas (i.e., H 2 buffered in N 2 ) to help decompose the oxides [16]. These novel approaches have not been widely implemented, because they are difficult to merge with established industrial flip-chip bonding production-lines, and require relatively costly modifications to the manufacturing infrastructure.…”
Section: Electronic-photonic Integrationmentioning
confidence: 99%
“…Driven by the economic pressure of reducing chip-footprints, and the need for more-and-more electronic interconnects to increase device functionality and speed, there is a constant push to reduce the pitch of the connections between the PIC and the electronic-IC. For conventional solder-ball-bumps (SBBs), the interconnect pitch is limited to approximately 50-100 μm [9], which gives an interconnect density on the order of 200 mm −2 . Copper-pillar-bump (CPB) interconnects have recently been proposed for high-density electronic-photonic integration, because they offer an even lower pitch and better RFand thermal-coupling between the PIC and electronic-IC [10].…”
Section: Introductionmentioning
confidence: 99%
“…The vertical integration of an EIC on a PIC can be made using either solder-ball-bump (SBBs) or copper-pillar-bump (CPBs) interconnects, which provide an electrical, mechanical, and thermal interface between the two chips [46,47]. In particular, vertical integration improves the high-speed electronic interface to the PIC, because it acts to replace long (100-500 µm) possibly curved, wire-bonds with short (≈10 µm) SBB or CPB interconnects, which minimizes parasitic induction effects [48][49][50]-see Figure 12.…”
Section: Vertical Integrationmentioning
confidence: 99%