Flip chip microassembly of a silicon triaxial force sensor on flexible substrates

Sieber, Arne; Valdastri, Pietro; Houston, Keith; Menciassi, Arianna; Dario, P.

doi:10.1016/j.sna.2007.02.042

Cited by 19 publications

(9 citation statements)

References 4 publications

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“…A first prototype of a cutting blade based on a triaxial MEMS force sensor (Beccai et al, 2005) was presented in (Valdastri et al, 2005). With the help of an advanced assembly process (Sieber et al, 2007) the MEMS sensor could be directly mounted on a flexible substratewhich allowed a further miniaturization of the sensorized cutting device as detailed in (Valdastri et al, 2007).…”

Section: Robotic Assisted Minimal Invasive Surgerymentioning

confidence: 99%

Haptics Rendering and Applications

Saddik¹

2012

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is a University Research Chair and Professor in the School of Electrical Engineering and Computer Science at the University of Ottawa. He is an internationally-recognized scholar who has made notable contributions to the knowledge and understanding of multimedia computing, communications and applications -particularly in the digitization, communication and security of the sense of touch ("haptics") which is a new medium that is significantly changing the way in which human-to-human and human-computer interactions are performed. He has authored and co-authored four books, more than 350 publications and received research grants and contracts totaling more than $16 Mio. More than 90 researchers were under his mentorships and he received several international awards. He is currently a fellow of the Engineering Institute of Canada, The Canadian Academy of Engineers and IEEE.

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Section: Robotic Assisted Minimal Invasive Surgerymentioning

confidence: 99%

Haptics Rendering and Applications

Saddik¹

2012

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“…Examples are grains of powder like drugs or cosmetics, optomechatronic parts like balls, pegs, pins, threads, membranes, lenses, shutters, and fibers. Rarely do these microparts define the final products; they must usually be assembled into 3-D micro electro mechanical system (MEMS) (Tsuchiya et al 1999;Yang et al 2003;Dechev et al 2004;Pascual 2005;Xie et al 2007;Sieber et al 2008; and micro opto electro mechanical systems (MOEMS) (Hoffmann and Voges 2001;Aoki et al 2003;Popa and Stephanou 2004;Pascual 2005). For that purpose, some robotic setups have been developed (Sato et al 1995;Kasaya et al 1999;Nelson et al 1999;Ralis et al 2000;Yang et al 2003;Matsumoto et al 2003;Popa andStephanou 2004, Schacklock andSun 2005;Kim et al 2006;Xie et al 2007;Cvetanovic et al 2008;Probst et al 2009;Fatikow et al 2009).…”

Section: Nomenclature Amentioning

confidence: 99%

A Trifocal Transfer-Based Virtual Microscope for Robotic Manipulation of MEMS Components

Dembélé

Bert

Tamadazte

et al. 2010

International Journal of Optomechatronics

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This article investigates the problem of imaging at the microscale. The trifocal transfer-based novel view synthesis approach is developed and applied to the images from two photon microscopes mounted in a stereoscopic configuration and vertically observing the work scene. The final result is a lateral virtual microscope working up to six frames per second with a resolution up to that of the real microscopes. Visual feedback, accurate measurements, and control have been used to show robotic manipulation of MEMS parts.

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“…The spacer thickness varied from 250 μm to 500 μm. Recently Sieber et al [36] reported the microassembly (handling, positioning and bonding) of a force sensor (1.5 mm × 1.5 mm × 0.65 mm) for use in biomedical devices.…”

Section: Overviewmentioning

confidence: 99%

Robotic micromanipulation for microassembly: modelling by sequencial function chart and achievement by multiple scale visual servoings

Tamadazte

Fort-Piat²,

Dembélé³

et al. 2009

J. Micro-Nano Mech.

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The paper investigates robotic assembly by focusing on the manipulation of microparts. This task is formalized through the notion of basic tasks which are organized in a logical sequence represented by a function chart and interpreted as the model of the behavior of the experimental setup. The latter includes a robotic system, a gripping system, an imaging system, and a clean environment. The imaging system is a photon videomicroscope able to work at multiple scales. It is modelled by a linear projective model where the relation between the scale factor and the magnification or zoom is explicitly established. So, the usual visual control law is modified in order to take into account this relation. The manipulation of some silicon microparts (400 μm × 400 μm × 100 μm) by means of a distributed robotic system (xyθ system, ϕz system), a twofinger gripping system and a controllable zoom and focus videomicroscope shows the relevance of the concepts. The 30% of failure rate comes mainly from the physical phenomena (electrostatic and capillary forces) instead of the accuracy of control or the occultations of microparts.

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Flip chip microassembly of a silicon triaxial force sensor on flexible substrates

Cited by 19 publications

References 4 publications

Haptics Rendering and Applications

Haptics Rendering and Applications

A Trifocal Transfer-Based Virtual Microscope for Robotic Manipulation of MEMS Components

Robotic micromanipulation for microassembly: modelling by sequencial function chart and achievement by multiple scale visual servoings

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