2014
DOI: 10.1016/j.mee.2014.06.001
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Fluctuations of the number of adsorbed molecules due to adsorption–desorption processes coupled with mass transfer and surface diffusion in bio/chemical MEMS sensors

Abstract: A comprehensive theoretical model of the fluctuations of the number of adsorbed molecules in MEMS bio/chemical sensors is presented for the first time; the model takes into account the processes of mass transfer, adsorption and desorption, and surface diffusion of adsorbed molecules. The numerical calculations performed using the derived theory show that the influence of surface diffusion on the fluctuations spectrum is significant and that it also depends on the species of adsorbed molecules.

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Cited by 12 publications
(16 citation statements)
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“…Random Number Generator (RNG) is implemented as a stable generator of digitally synthesized random voltage. RNG outputs to a 12-bit D/A converter, which produces a uniform noise signal s p limited within ±2,5 V. Both RNG and D/A converter operate at 125 kHz rate, which covers most types of lowfrequency noise met in latest graphene-based sensors [15][16][17][18]. The generated noise s p is then adjusted with a voltage divider (potentiometer P) to give a noise signal s, which is simultaneously measured by the proposed experimental device (shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…Random Number Generator (RNG) is implemented as a stable generator of digitally synthesized random voltage. RNG outputs to a 12-bit D/A converter, which produces a uniform noise signal s p limited within ±2,5 V. Both RNG and D/A converter operate at 125 kHz rate, which covers most types of lowfrequency noise met in latest graphene-based sensors [15][16][17][18]. The generated noise s p is then adjusted with a voltage divider (potentiometer P) to give a noise signal s, which is simultaneously measured by the proposed experimental device (shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…This resembles the noise encountered in application of the emerging graphene-based sensors [15][16][17][18], where the noise is the signal that needs to be measured. Hence, this experiment has a practical significance as it proves a possibility of utilizing the stochastic measurement approach in conjunction with graphene-based sensors.…”
Section: Discussionmentioning
confidence: 99%
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“…Alternatively, expressions developed in [21] can be used if bi-component monolayer adsorption occurs. One could also use another appropriate expression for the power spectral density of resonator mass fluctuations caused by various adsorption-desorption processes (arbitrary mixture of gases [28], multilayer adsorption [29], adsorption-desorption processes coupled with mass transfer and surface diffusion [30], etc. ).…”
Section: Phase Noise Induced By Mass Fluctuationsmentioning
confidence: 99%
“…Microbeams, as the most widely used microscale continuous elements, can be found in various microelectromechanical devices [2]. Nowadays, the usage of beam-shaped structures has widely spread in micro and nano electromechanical systems (MEMS and NEMS) as elements such shock sensors [3], micro-actuators [4], accelerometers [5], bio-MEMS [6], atomic force microscopes, and so on [7,8]. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.…”
Section: Introductionmentioning
confidence: 99%