Fluid simulation of the E-H mode transition in inductively coupled plasma

Abstract

One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.

Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

“…Comparison with Ref. 25 shows that the selection of the uniform conductivity indeed generates a more reasonable field structure, especially for a capacitive field. We believe that the omission of the spatial variation in the conductivity parameter will not significantly influence the main results, since very similar mode transitions are observed for both forms of the conductivity.…”

“…Nevertheless, to preserve the validity of the separation of variables method, the spatially averaged, instead of the spatially resolved, conductivity was used. In our previous work, 25 the spatial conductivities were directly input into the field equations, based on the local approximation used in that paper. In the present work, the spatial conductivity is replaced by this volume mean value.…”

“…In Ref. 25, we developed a fluid model that is capable of modeling the mode transition kinetics of ICP sources. In the present work, this model has been significantly improved by introducing an equivalent circuit module, and with this new version of the fluid model, we have explored the mode transition behavior as a function of the characteristics of the circuit matching.…”

Modulations of the plasma uniformity by low frequency sources in a large-area dual frequency inductively coupled plasma based on fluid simulations

“…This behavior can be explained theoretically. Zhao et al27 employed the electromagnetic theory with local-density approximation to simulate the electromagnetic field distribution in ICPs. They found that the radial component of the azimuthal field in the plasma region is related to the Bessel functionsFIG.…”

Magnetic Design for an Electrodeless Discharged Lamp

“…Therefore, development of an analysis method for Inductively-Coupled Plasma (ICP) in the lamp is effective to design the suitable lamp shape. Although some simulation K. Kakehashi is with the Panasonic Electric Works Information Systems Co.，Ltd., 1048, Kadoma, Osaka, 571-8686, Japan method for ICP were reported [4][5][6] II. ANALYSIS PROCEDURE , analysis target of them is RF-driven ICP such as plasma process and ion engine.…”