Fluid-Structure Coupling Analysis of Traveling Wave Micro-Pump

Abstract

The generation method of traveling wave and the driving force source in straight micro channel were investigated based on the vibration theory. The analysis shows that the driving force in traveling wave micro-pump is closely related to the fluctuations of the channel wall and there is traveling standing wave along the straight micro channel. Through fluid-structure coupling analysis, flow characteristics in straight micro channel are obtained as well as the outlet velocity. The average outlet velocity is about several hundreds of nanometers percent second if only the mechanical force is considered. The influence of the driving voltage on the velocity is also analyzed to provide guidance on the optimal design of the traveling wave micro-pump.