2001
DOI: 10.1088/0960-1317/11/5/313
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Fluidic microsystems based on printed circuit board technology

Abstract: In this paper, fluidic microsystems based on an alternative fabricating technology are described. This technology mainly utilizes the manufacturing principles of printed circuit boards (PCBs). Minimal lateral structure dimensions of approximately 100 µm und vertical dimensions of some 10 µm are feasible. By introducing thin polymeric foils (6-13 µm in thickness) into a stack of PCBs, movable parts forming active or passive valves, pumps or sensors can be produced. The first results concerning several fluidic c… Show more

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Cited by 62 publications
(41 citation statements)
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“…For example, through postprocessing steps such as etching, the Cu layer can be machined into diffusers/nozzles, pump chambers [20], and thermal flow sensing electrodes [21]. Also, hot embossing and multilayer lamination steps have been used to build entire microfluidic channels, pumps and valves in the PCB polymer substrate [22]. Table I lists fabrication methods, electrical capabilities, feature sizes, device sizes and typical fabrication costs for IC processes, PCB technology, widely used PDMS molding and in-house cleanroom processes.…”
Section: Multi-layer Pcb For Digital Microfluidics a The Ideamentioning
confidence: 99%
“…For example, through postprocessing steps such as etching, the Cu layer can be machined into diffusers/nozzles, pump chambers [20], and thermal flow sensing electrodes [21]. Also, hot embossing and multilayer lamination steps have been used to build entire microfluidic channels, pumps and valves in the PCB polymer substrate [22]. Table I lists fabrication methods, electrical capabilities, feature sizes, device sizes and typical fabrication costs for IC processes, PCB technology, widely used PDMS molding and in-house cleanroom processes.…”
Section: Multi-layer Pcb For Digital Microfluidics a The Ideamentioning
confidence: 99%
“…The proposed technology, in addition to the use of copper as structural material for the microfluidic network [18], allows the integration of microfluidic devices with heterogeneous components, such as electronic circuits [19], sensors [20], and microheaters, following the current trend in LOC technology [21]. To complement our experiments, SC and CF DNA amplification devices fabricated on polymeric substrates with integrated microheaters are simulated.…”
Section: Introductionmentioning
confidence: 99%
“…A large number of relevant works has been published within the last three decades, mainly describing different technology implementations and variations of the operating principles (Van Putten et al 1996;Wang et al 2009). The majority of the presented microsensors are fabricated by the means of Si-based MEMS technologies, while a relatively recent trend concerns a type of sensors which employ a printed circuit board (PCB) instead of a silicon wafer as the substrate material (Petropoulos and Kaltsas 2010;Wego et al 2001). A special category of flow sensors enables the quantification of fluid flow within microchannels.…”
Section: Introductionmentioning
confidence: 99%