Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography

Schvartzman, Mark; Mathur, Anurag; Kang, Yuji; Jahnes, C.; Hone, James; Wind, Shalom J.

doi:10.1116/1.3013281

Cited by 18 publications

(13 citation statements)

References 30 publications

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“…Recent studies have demonstrated the power of this approach, particularly in the study of immune cell function, but more widespread application is currently hampered by the lack of patterning throughput at the appropriate scales. Continued development of high-throughput techniques such as nanoimprint lithography (Guo, 2004; Schvartzman et al, 2008) as well as increased availability of more conventional, optical methods will make these systems available to a wider audience.…”

Section: Discussionmentioning

confidence: 99%

Capturing the nanoscale complexity of cellular membranes in supported lipid bilayers

Kam

2009

Journal of Structural Biology

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The lateral mobility of cell membranes plays an important role in cell signaling, governing the rate at which embedded proteins can interact with other biomolecules. The past two decades have seen a dramatic transformation in understanding of this environment, as the mechanisms and potential implications of nanoscale structure of these systems has become accessible to theoretical and experimental investigation. In particular, emerging micro-and nano-scale fabrication techniques have made possible the direct manipulation of model membranes at the scales relevant to these biological processes. This review focuses on recent advances in nanopatterning of supported lipid bilayers, capturing the impact of membrane nanostructure on molecular diffusion and providing a powerful platform for further investigation of the role of this spatial complexity on cell signaling.

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Section: Discussionmentioning

confidence: 99%

Capturing the nanoscale complexity of cellular membranes in supported lipid bilayers

Kam

2009

Journal of Structural Biology

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“…DLC film can be coated on the mold patterns, and nanoscale patterns can be fabricated directly on the DLC surface. A fluorinated DLC mold has low surface energy and is suitable for successful transfer of sub-50-nm patterns [31].…”

Section: Methods For Controlling the Adhesion Energymentioning

confidence: 99%

Tribology issues in nanoimprint lithography

Kim

Lee

et al. 2010

J Mech Sci Technol

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Nanoimprint lithography (NIL) is one of the most promising technologies for nanofabrication because it can create nano-and microscale structures and devices in a cost-effective manner. In the NIL process, a mold with patterns on its surface comes in contact with a polymer film on a substrate. The patterns are transferred to the polymer film and then the mold is separated from the film. Mechanical contact between the mold and the polymer film, and between the film and the substrate, is inevitable. In some cases, during the separation process, adhesion and friction forces at the interfaces can deform and fracture the transferred patterns and detach the polymer film from the substrate. Thus, controlling the adhesion and friction between the materials in contact is very important in achieving a successful pattern transfer and making the NIL process a robust nanofabrication technique. Many theoretical and experimental research efforts have been made to clarify the tribological phenomena in NIL and to reduce defects due to adhesion and friction. This article describes the tribological problems encountered and reviews the related research.

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“…19 PMMA surface fluorination was done in an Oxford PlasmaLab 80 Plus etch system using C 4 F 8 gas as source material. The wafers were initially cleaned by rinsing with acetone and isopropyl alcohol and by exposing them to an oxygen plasma for 1 min (Diener Plasma Etch System).…”

Section: B Substrate Fabricationmentioning

confidence: 99%

Selective placement of DNA origami on substrates patterned by nanoimprint lithography

Penzo¹,

Wang²,

Palma³

et al. 2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Articles you may be interested inCylindrical glass nanocapillaries patterned via coarse lithography (>1μm) for biomicrofluidic applications Biomicrofluidics 6, 046502 (2012); 10.1063/1.4771691Optofluidic in situ maskless lithography of charge selective nanoporous hydrogel for DNA preconcentration Biomicrofluidics 4, 043014 (2010);Self-assembled DNA nanostructures can be used as scaffolds to organize small functional nanocomponents. In order to build working devices-electronic circuits, biochips, optical/photonics devices-controlled placement of DNA nanostructures on substrates must be achieved. Here we present a nanoimprint lithography-based process to create chemically patterned templates, rendering them capable of selectively binding DNA origami. Hexamethyldisilazane (HMDS) is used as a passivating layer on silicon dioxide substrates, which prevents DNA attachment. Hydrophilic areas, patterned by nanoimprint lithography with the same size and shape of the origami, are formed by selective removal of the HMDS, enabling the assembly of the origami scaffolds in the patterned areas. The use of nanoimprint lithography, a low cost, high throughput patterning technique, enables high precision positioning and orientation of DNA nanostructures on a surface over large areas.

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Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography

Cited by 18 publications

References 30 publications

Capturing the nanoscale complexity of cellular membranes in supported lipid bilayers

Capturing the nanoscale complexity of cellular membranes in supported lipid bilayers

Tribology issues in nanoimprint lithography

Selective placement of DNA origami on substrates patterned by nanoimprint lithography

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