Fluorinated DLC for tribological applications

Sung, James C.; Kan, Ming-Chi; Sung, Michael

doi:10.1016/j.ijrmhm.2008.11.008

Cited by 32 publications

(17 citation statements)

References 1 publication

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“…The Raman spectra showed that the H 2 plasma treatment resulted in a shift of G peak toward lower wave number values up to 30 min and increased with further plasma exposure time. This indicates the increase in sp 3 C-C bonding fraction [1,8]. It is attributed to the etching of sp 2 C¼ C carbon by the H þ ions during the plasma treatment.…”

Section: Raman Spectramentioning

confidence: 92%

“…In general, the DLC films deposited by PECVD are generally hydrogenated and they exhibit lower friction coefficient in inert and vacuum atmospheres. However, films deposited by pulsed laser and sputtering techniques are mostly hydrogen free and show better lubricious property under humid and moist conditions [1,4,22]. The films S15 and S30 possessed friction coefficients 2 to 3 folds higher compared to the S0 film.…”

Section: Contact Anglementioning

confidence: 99%

“…Low friction coefficient and high wear resistance of DLC films are considered to be ideal for several sliding applications [1][2][3][4]. DLC films are amorphous in nature and their physical and chemical characteristics mainly depend on the hydrogen content and sp 2 C ¼ C to sp 3 C-C ratio [2].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Polaki

Kumar

Krishna

et al. 2015

Tribology International

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Section: Raman Spectramentioning

confidence: 92%

Section: Contact Anglementioning

confidence: 99%

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Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Polaki

Kumar

Krishna

et al. 2015

Tribology International

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“…93 Though higher uorination DLC lms [F/(F + C) > 0.4] seem to be so and have no wear resistance, moderate uorinated DLC lms [F/(F + C) < 0.2] can have a similar friction level and a lower surface energy compared to conventional a-C:H lms. Compared with conventional DLC lms, uorinated DLC lms are more inert and lubricant.…”

Section: Tribological Propertiesmentioning

confidence: 99%

“…93 Though higher uorination DLC lms [F/(F + C) > 0.4] seem to be so and have no wear resistance, moderate uorinated DLC lms [F/(F + C) < 0.2] can have a similar friction level and a lower surface energy compared to conventional a-C:H lms. 93,96,97 Currently, it is widely believed that uorine, added into conventional DLC lms, plays two vital roles in the low friction behavior, which are passivation and repulsive forces. 95 It is still found that the repulsive force of F/F terminated surfaces is larger than that of H/H terminated surfaces under the same distance, whose repulsive force is greater than zero.…”

Section: Tribological Propertiesmentioning

confidence: 99%

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Zhang

Wang

et al. 2015

RSC Adv.

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Fluorine easily substitutes hydrogen in DLC films due to its monovalence and high electronegativity. The peculiarities of fluorine bestow low surface energy, low inner stress, good thermal stability, preeminent tribological properties and biocompatibility on fluorine-containing, diamond-like carbon (F-DLC) films.Although there are some reviews that introduce the important advances in DLC films, they are not particularly focused on the promising F-DLC films. In this review, we mainly concentrate on the mechanical and tribological properties of F-DLC films. The mechanical properties, including hardness, modulus, and inner stress, will be discussed thoroughly. More importantly, the eminent tribological properties of F-DLC films would be emphasized based on the surface passivation and repulsive forces induced by fluorine atoms from the surface chemical and micro-mechanical viewpoints. Finally, some existing challenges and promising breakthroughs about F-DLC films are also proposed. It is expected that these films would be produced on a large scale and applied extensively in industrial applications such as micro-electro-mechanical systems, ultralarge scale integrated circuits, thin film transistor liquid crystal displays and biomedical devices.

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Lower friction and higher wear resistance of fluorine‐incorporated amorphous carbon films

Cui

Zhang

et al. 2013

Surface & Interface Analysis

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Plasma‐enhanced chemical vapor deposition was employed to fabricate hydrogenated amorphous carbon (a‐C:H) films and fluorine‐doped hydrogenated amorphous (a‐C:H:F) carbon films. For comparison purpose, the a‐C:H films were treated with CF4 plasma. The bonding structure and tribological behavior of the films were investigated. The results indicate that the F presented mainly in the forms of C–F3, C–F and C–F2 groups in both the a‐C:H:F film and the surface CF4 plasma processed hydrogenated amorphous carbon (F‐P‐a‐C:H) films. Moreover, the a‐C:H:F films, because of the transformation of sp3 to sp2, possess a lower friction coefficient than that of the F‐P‐a‐C:H films. Copyright © 2013 John Wiley & Sons, Ltd.

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Fluorinated DLC for tribological applications

Cited by 32 publications

References 1 publication

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Lower friction and higher wear resistance of fluorine‐incorporated amorphous carbon films

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