2022
DOI: 10.1016/j.seppur.2022.120561
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Fluorinated porous organic polymers for efficient recovery perfluorinated electronic specialty gas from exhaust gas of plasma etching

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Cited by 14 publications
(6 citation statements)
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“…35). [310][311][312] Monomer elongation was an efficient strategy to increase the fluorine contents of the frameworks and promote the separation performance. For example, PAF-8F with higher fluorine contents exhibited greatly improved SF 6 /N 2 selectivity (365.22) compared to PAF-4F (145.58).…”
Section: Perfluorinated Gas/n 2 Separation Using Apm Adsorbentsmentioning
confidence: 99%
See 2 more Smart Citations
“…35). [310][311][312] Monomer elongation was an efficient strategy to increase the fluorine contents of the frameworks and promote the separation performance. For example, PAF-8F with higher fluorine contents exhibited greatly improved SF 6 /N 2 selectivity (365.22) compared to PAF-4F (145.58).…”
Section: Perfluorinated Gas/n 2 Separation Using Apm Adsorbentsmentioning
confidence: 99%
“…For instance, POPTrA-8F with higher fluorine contents but a longer precursor exhibited lower perfluorinated gas/N 2 selectivity compared with POPTrA-4F, which is attributed to weaker confinement towards the perfluorinated gases. 310 In terms of designing fluorinated frameworks, the introduction of alkyl fluorine onto frameworks is relatively rare and challenging compared with fluorination of the aromatic units. 323,324 With a trifluoromethyl modified channel, Zn (hfipbb) showed high affinity towards PFCs, which could adsorb 87 mg g À1 of perfluorohexane (C 6 F 14 ) at 298 K and 1 bar.…”
Section: Perfluorinated Gas/n 2 Separation Using Apm Adsorbentsmentioning
confidence: 99%
See 1 more Smart Citation
“…In recent years, porous polymers have received considerable attention and exhibited important applications in gas storage and separation, 1,2 adsorption, 3,4 catalysis, 5,6 energy storage, 7,8 and drug delivery. 9–11 Compared to conventional inorganic porous materials (such as zeolites, 12 porous carbons, 13–15 and mesoporous silica 16 ) and metal–organic frameworks (MOFs), 17–23 porous organic polymers (POPs) offer excellent stability, high specific surface areas, and ease of functionalization, making them suitable for advanced applications (Table 1).…”
Section: Introductionmentioning
confidence: 99%
“…Several POPs with polar segments were prepared and tested in reversible water vapour capture from the air [ 19 , 20 ]. On the contrary, highly hydrophobic fluorine-rich POPs were also prepared [ 21 , 22 ] and applied to capture the vapour of non-polar hydrocarbons and fluorinated compounds. Application-interesting POPs with ionic [ 20 , 23 ], luminescent [ 24 ], chiral [ 25 , 26 ], and other groups [ 27 , 28 ] were also reported in the literature.…”
Section: Introductionmentioning
confidence: 99%