Kirk-Othmer Encyclopedia of Chemical Technology 2000
DOI: 10.1002/0471238961.1608151912091404.a01
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Fluorine Compounds, Inorganic, Phosphorus

Abstract: Phosphorus forms many fluorine compounds, including the binary fluorides, oxyfluorides, thiofluoride, and the various fluorophosphoric acids and their salts. Whereas PF 5 behaves as a Lewis acid, phosphorus trifluoride behaves as a Lewis base. PF 5 is used as a catalyst in the electronics industry and in ion implantation for semiconductors. The mono‐, di‐, and hexafluorophosphoric acids are commercially available. Hexafluorophosphoric acid is used in polymerizati… Show more

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