Fluorine-doped ZnO transparent conducting thin films prepared by radio frequency magnetron sputtering

Effect of Al-doped on physical properties of ZnO Thin films grown by spray pyrolysis on SnO2: F/glass

“…Recently, ZnO thin films have been used as a window layer and contact layer for thin film solar cells with Cu(In,Ga)S 2 or Cu(In,Ga)Se 2 absorber material. ZnO films have been prepared by various methods of film depositions, which include radio frequency magnetron sputtering [9][10][11], sol-gel processing [12][13][14][15][16], spray pyrolysis [17,22], etc. Among these methods, the spray pyrolysis method is one of the most commonly used methods for preparation of transparent and conducting oxides owing to its simplicity, safety, non-vacuum system of deposition.…”

“…Other advantage of the spray pyrolysis method is that it can be adapted easily for production of large-area films. In fact, to enhance its electrical and optical properties, ZnO is commonly doped with one of the following elements: Indium [20], Fluorine [9], Aluminum [11][12][13][16][17][18][19], Gallium [14], Cobalt [15] and Tin [21]. In particular, the main reason of being chosen of aluminum as the dopant of ZnO is to enhance the electrical conductivity.…”

“…It is well known that the physical properties of thin films depend on the substrate properties. Up to now, ZnO thin films were prepared on silicon, Al 2 O 3 , kapton, ZnO:Al, glass and sapphire substrates [9][10][11][12][13][14][15][16][17][18][19][20][21][22]. In this paper, we present the effect of aluminum dopant concentration ratio in the spray solution (y=( [Al 3+ ]/[Zn 2+ ]) solution = 0, 1%, 2% and 3%) on the structural, electrical and optical properties of ZnO thin layers deposited by chemical spray on nanostructured substrates such as fluorine doped tin oxide (FTO).…”

Structural and Electrical Properties of Ga-doped ZnO-SnO2Films

“…투명박막의 경우 주로 전도성이 좋은 도전 막의 개발에 연구가 집중되어 왔으나, 투명전자소자 의 집적화를 위해서는 고저항 투명박막의 개발도 필 a. Corresponding author; tyma@gnu.ac.kr 요하다 [3,4].…”

ZnO:H indium-free transparent conductive electrodes for active-matrix display applications

“…In this respect, the proposed ZnO:H films will work perfectly with OLEDs. It should be reminded that ZnO:H is chosen in this work to conceptually demonstrate the application of conductive ZnO to AM displays; however, other variants, including ZnO/IGZO doped by boron, 10,11 phosphorus, 18 arsenic, 19 or fluorine 20,21 implantation, or by argon, [22][23][24] helium, 25 or NH 3 26 plasma, can perform similar roles in AM displays.…”