Fly &lt;italic&gt;Ormia Ochracea&lt;/italic&gt; Inspired MEMS Directional Microphone: A Review

Ishfaque, Asif; Kim, Byungki

doi:10.1109/jsen.2017.2787862

Cited by 24 publications

(17 citation statements)

References 97 publications

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“…The conventional MEMS acoustic sensor with working frequency in the audio range, aka microphone, consists of a flexible membrane and a back-plate with a bias voltage using a capacitive sensing mechanism as shown in Figure 4a [62]. Due to the limits of maximum signal level and sensitivity to environmental conditions, more sensing mechanisms have been investigated to improve acoustic sensor performance [63][64][65][66][67][68], which includes using back-plate-less design to minimize air damping, using piezoelectric sensing to achieve low power directional detection and using optical sensing to work at extreme environmental conditions, etc. Lo et al proposed a no-back-plate structure that had 42 pairs of planar interdigitated electrodes (IDTs) in the same plane of the diaphragm as shown in Figure 4b [65].…”

Section: Mems Acoustic Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Section: Mems Acoustic Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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“…The design was further fabricated using an integrated surface and bulk micromachining process on silicon on insulator (SOI) wafer, and the naturalfrequency sound-induced modes were measured using laser vibrometry [213]. More details about the applications and transduction methods of a directional microphone can be found in a review paper [214]. The recent and missing directional microphone designs in [214] will be our focus in this part of our review paper.…”

Section: Directional Microphonesmentioning

confidence: 99%

“…More details about the applications and transduction methods of a directional microphone can be found in a review paper [214]. The recent and missing directional microphone designs in [214] will be our focus in this part of our review paper.…”

Section: Directional Microphonesmentioning

confidence: 99%

Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio frequency range has been presented. Since the microphone membrane is made of a thin film, it has residual stress that degrades the microphone performance. An in-depth detailed review of research articles containing solutions to relieve these stresses has been presented. The comparative analysis of fabrication processes of single- and dual-chip omnidirectional microphones, in which the membranes are made up of single-crystal silicon, polysilicon, and silicon nitride, has been done, and articles containing the improved performance in these two fabrication processes have been explained. This review will serve as a starting guide for new researchers in the field of capacitive MEMS microphones.

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“…There have been a lot of new developments since then, but there has been no subsequent review until recently. In 2018, Ishfaque et al [30] published their review paper on the silicon microphone. However, these authors only focused on the advances in directional microphones that are inspired by the parasitic fly called Ormia Ochrasia.…”

Section: Introductionmentioning

confidence: 99%

A Review of MEMS Capacitive Microphones

et al. 2020

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This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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Fly <italic>Ormia Ochracea</italic> Inspired MEMS Directional Microphone: A Review

Cited by 24 publications

References 97 publications

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Design Approaches of MEMS Microphones for Enhanced Performance

A Review of MEMS Capacitive Microphones

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