Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

Abstract

A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter ~10 m in a relatively stiff material of insect's exocuticle (E = ~10 9 Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess-and strainconcentrating-hole-features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, thorugh-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membranein-recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor.

Brain Inspired Cognitive Systems 2008

“…Different types of sensors for olfactory and other senses may be based on ion sensitive FETs (ISFETs) [HAC04] and chemical sensitive FETs (chemFETs) [HN02]: these new technologies are based directly on FETs and so are clearly integratabtle on to CMOS systems, although dealing the the nearness of liquids presents some novel problems for such electrical equipment. There is also work ongoing in the development of proprioceptary sensors [WZPF06]. Being able to directly incorporate the transduction on to the CMOS system both reduces complexity and component count, and permits processing to be applied directly to the signal allowing the chip to produce usable outputs directly.…”

Neuromorphic Systems: Past, Present and Future

“…Below, we review particularly visual, auditory, olfactory and tactile neuromorphic systems. There has recently also been interest in proprioceptary sensors as well [WZPF06]. So far as the author is aware, there have not been any neuromorphic implementation of systems for taste!…”

“…Different types of sensors for olfactory and other senses may be based on ion sensitive FETs (ISFETs) [HAC04] and chemical sensitive FETs (chemFETs) [HN02]: these new technologies are based directly on FETs and so are clearly integratabtle on to CMOS systems, although dealing the the nearness of liquids presents some novel problems for such electrical equipment. There is also work ongoing in the development of proprioceptary sensors [WZPF06]. Being able to directly incorporate the transduction on to the CMOS system both reduces complexity and component count, and permits processing to be applied directly to the signal allowing the chip to produce usable outputs directly.…”