Siloxane adsorption on disk surfaces is investigated as a function of lubricant film thickness and carbon film composition through several analytical technologies including FTIR, XPS, TOF-SIMS, GC−MS, and Candela OSA. Disk parameters that govern the propensity for siloxane adsorption are identified. Lubricant film coverage, taken as the fractional monolayer thickness, is found to be the most significant determinant. Siloxane adsorption decreases with increasing lubricant film coverage. The nitrogen content of the underlying carbon film is also found to be a determinant for submonolayer lubricant films: On the one side, siloxane adsorption on carbon films increases with increasing atom % nitrogen in carbon films. On the other side, the lubricant monolayer film thickness increases with increasing atom % N in carbon films, i.e., lubricant film coverage decreases with increasing atom % N. Thus, increasing atom % N in carbon films leads to increasing siloxane adsorption.