1996
DOI: 10.1016/0304-3991(96)00011-3
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Focal-series reconstruction in HRTEM: simulation studies on non-periodic objects

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Cited by 257 publications
(144 citation statements)
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“…Holographic data of the exit-plane wave function of the electron wave in TEM were retrieved by focal series reconstruction (FSR) (29,30). For high-resolution TEM, the combination of a sphericalaberration correction in the microscope with the numerical FSR improved the control and correction of residual parasitic lens aberrations (31).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Holographic data of the exit-plane wave function of the electron wave in TEM were retrieved by focal series reconstruction (FSR) (29,30). For high-resolution TEM, the combination of a sphericalaberration correction in the microscope with the numerical FSR improved the control and correction of residual parasitic lens aberrations (31).…”
Section: Resultsmentioning
confidence: 99%
“…Focal series reconstruction (FSR) was used to retrieve the phase of the electron exit plane wavefunction (29,30). Experimental focal series were taken with an equidistant focal step corresponding to half the defocus spread of the microscope at the respective acceleration voltage.…”
Section: Methodsmentioning
confidence: 99%
“…It is an interferogram of scattered beams andin general -image simulations are required to relate the recorded intensity pattern to the materials structure. Directly interpretable images with atomic resolution became available more recently by the reconstruction of the electron exit waves from focal series of lattice images [23,24] (Fig. 1, center) or by recording HAADF-STEM images (Fig.…”
Section: Instrumental Improvementsmentioning
confidence: 99%
“…Therefore, sub-Ångstrom resolution can be achieved [27,28] and dislocation cores in <110> oriented semiconductors can be imaged with truly atomic resolution, which was not possible before since their dumbbell spacing in <110> projection is often smaller (< 0.15 nm) than the typical 0.18 nm Scherzer point resolution of traditional phase contrast microscopes [27]. Moreover, residual lens aberration can be corrected by numerical phase plates in the exit wave reconstruction process [24]. This approach complements the successful correction of lens aberrations by hardware correctors [29] and for reasons outlined in References 22 and 30 it is most advantageous to combine both methods.…”
Section: Instrumental Improvementsmentioning
confidence: 99%
“…
The combination of imaging in a spherical-aberration corrected transmission electron microscope [1][2] with subsequent numerical focal series reconstruction of the exit-plane wave function (EPW) [3][4] is applied to achieve a reliable quantification of the position of individual atomic columns in defects. An approach for the determination of individual atomic column positions which allows the quantification of the measurement accuracy and is appropriate for non-periodic defects is presented.
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mentioning
confidence: 99%