Focused Electron Beam‐Induced CVD of Iron: a Practical Guide for Direct Writing

Gavagnin, Marco; Wanzenboeck, Heinz D.; Shawrav, Mostafa M.; Belić, Domagoj; Wachter, Stefan; Waid, Simon; Stöger-Pollach, Michael; Bertagnolli, E.

doi:10.1002/cvde.201407118

Cited by 16 publications

(25 citation statements)

References 42 publications

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“…The abbreviation a-C:H,O,F reads as amorphous carbon being hydrogenated, oxygenated, and/or fluorinated. [64] FEB: [60][61][62][63][64][65][66][67][68][69][70] No FIB data * Literature references in these two columns differ from column one (left) when no composition data was found there.…”

Section: D Nanoprinting Via Febid and Fibidmentioning

confidence: 99%

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

et al. 2020

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This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors. Gas-assisted focused electron and ion beam-induced deposition-based additive manufacturing technologies enable the direct-write fabrication of complex 3D nanostructures with feature dimensions below 50 nm, pore-free and nanometer-smooth high-fidelity surfaces, and an increasing flexibility in choice of materials via novel precursors. We discuss the principles, possibilities, and literature proven examples related to the mechanical properties of such 3D nanoobjects. Most materials fabricated via these approaches reveal a metal matrix composition with metallic nanograins embedded in a carbonaceous matrix. By that, specific material functionalities, such as magnetic, electrical, or optical can be largely independently tuned with respect to mechanical properties governed mostly by the matrix. The carbonaceous matrix can be precisely tuned via electron and/or ion beam irradiation with respect to the carbon network, carbon hybridization, and volatile element content and thus take mechanical properties ranging from polymeric-like over amorphous-like toward diamond-like behavior. Such metal matrix nanostructures open up entirely new applications, which exploit their full potential in combination with the unique 3D additive manufacturing capabilities at the nanoscale.

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Section: D Nanoprinting Via Febid and Fibidmentioning

confidence: 99%

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

et al. 2020

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“…Additionally, high-purity W deposits (around 95 atom %) and high-aspect-ratio carbon pillars were achieved using impact-enhanced desorption of residual organic ligands by means of a thermally energized, supersonic argon gas jet to deliver the precursor molecules. , This procedure is especially interesting to both substantially in situ enhance the growth rate and fine-tune the deposit carbon content by changing the properties of the jet delivering the precursor. Other surface science studies presented the autocatalysis-induced deposition of carbonyl precursors, such as Fe(CO) 5 , and Co 2 (CO) 8 , , to obtain pure metallic deposits. Moreover, beam-induced local heating has already been reported as the main effect responsible for increasing the metallic content in Co deposits. ,− Nevertheless, a postgrowth annealing protocol under high vacuum for electrical conductivity improvement of Co–C deposits has been recently proposed, , suggesting that metal–carbon nanocomposite systems can achieve electrical properties similar to pure metals.…”

Section: Introductionmentioning

confidence: 99%

Magnetoelectrical Transport Improvements of Postgrowth Annealed Iron–Cobalt Nanocomposites: A Possible Route for Future Room-Temperature Spintronics

Santos

Barth

Béron

et al. 2018

ACS Appl. Nano Mater.

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Focused-electron-beam-induced deposition (FEBID) constitutes a direct-writing maskless technique, which has been employed to prepare nanodots, nanolines, as well as laminar and even three-dimensional nanostructures with potential in many technological fields. Here, we report direct-writing of functional nanostructures with the HFeCo 3 (CO) 12 bimetallic carbonyl precursor. The metal content as well as the magnetotransport properties of Fe−Co−C−O deposits were reproducibly tuned upon ex situ postgrowth annealing at 100, 200, and 300 °C in a high-vacuum system. The atomic composition obtained by energy-dispersive X-ray spectroscopy (EDX) analysis revealed that carbonyl groups release during annealing, although principally sole oxygen is released from the deposits, yielding an atomic ratio of Co:Fe:C:O = 52:17:22:9 with respect to the atomic composition of as-grown Co:Fe:C:O = 41:13:26:20. Interestingly, the amorphous carbon contained in the as-grown material turns into graphite nanocrystals with an average size of around 11 nm with annealing at moderate temperatures, as suggested by Raman analysis. These compositional and microstructural changes permit tuning the deposits' electrical resistivity over 2 orders of magnitude from 4200 down to 65 μΩ cm. The anisotropic magnetoresistance (AMR) of the annealed deposits is about 1.2%, which represents the highest value so far reported for FEBID-grown materials. In addition, as a key feature for technological applications of the postgrowth treatment presented herein, the magnetotransport properties of the nanosized FEBID material degrade minimally after being stored at ambient conditions for more than one year. It turns out that both the iron and cobalt are protected from being oxidized under ambient atmosphere by the graphitic matrix. Furthermore, the incorporation of carbon atoms in ferromagnetic films allows for consistent improvements in their magnetic coercivity and reversing fields. This makes our material especially interesting and advantageous for applications in highdensity magnetic recording devices, nanoelectronics, nanoelectromechanical system-based (NEMS-based) sensors, and logic devices.

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“…FEBIP is an advanced and well-established technique for modifying samples on the nanometer scale. Depending on the precursor type it is possible to deposit metals (e.g., Co [ 7 – 8 ], Fe [ 9 – 10 ], Au [ 11 – 12 ], Pt [ 13 – 14 ]), insulators (e.g., SiO x [ 15 ]) and alloys (e.g., AuAg and AuPt [ 4 ]). Materials such as Si, SiO 2 , Si 3 N 4 , Cr, Ti and TaN can be etched [ 16 ].…”

Section: Introductionmentioning

confidence: 99%

The rational design of a Au(I) precursor for focused electron beam induced deposition

Marashdeh¹,

Tiesma²,

Velzen³

et al. 2017

Beilstein J. Nanotechnol.

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Au(I) complexes are studied as precursors for focused electron beam induced processing (FEBIP). FEBIP is an advanced direct-write technique for nanometer-scale chemical synthesis. The stability and volatility of the complexes are characterized to design an improved precursor for pure Au deposition. Aurophilic interactions are found to play a key role. The short lifetime of ClAuCO in vacuum is explained by strong, destabilizing Au–Au interactions in the solid phase. While aurophilic interactions do not affect the stability of ClAuPMe3, they leave the complex non-volatile. Comparison of crystal structures of ClAuPMe3 and MeAuPMe3 shows that Au–Au interactions are much weaker or partially even absent for the latter structure. This explains its high volatility. However, MeAuPMe3 dissociates unfavorably during FEBIP, making it an unsuitable precursor. The study shows that Me groups reduce aurophilic interactions, compared to Cl groups, which we attribute to electronic rather than steric effects. Therefore we propose MeAuCO as a potential FEBIP precursor. It is expected to have weak Au–Au interactions, making it volatile. It is stable enough to act as a volatile source for Au deposition, being stabilized by 6.5 kcal/mol. Finally, MeAuCO is likely to dissociate in a single step to pure Au.

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Focused Electron Beam‐Induced CVD of Iron: a Practical Guide for Direct Writing

Cited by 16 publications

References 42 publications

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Magnetoelectrical Transport Improvements of Postgrowth Annealed Iron–Cobalt Nanocomposites: A Possible Route for Future Room-Temperature Spintronics

The rational design of a Au(I) precursor for focused electron beam induced deposition

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