Focused electron beam induced deposition meets materials science

Abstract

simulation-assisted growth of complex three-dimensional nano-architectures is also covered. In the review particular emphasis is laid on conceptual clarity in the description of the different developments, which is reflected in the mostly schematic nature of the presented figures, as well as in the recurring final sub-sections for each of the main topics discussing the respective "challenges and perspectives".

Temperature-Dependent Growth Characteristics of Nb- and CoFe-Based Nanostructures by Direct-Write Using Focused Electron Beam-Induced Deposition

“…Direct-write nano-fabrication by focused electron and ion beam-induced deposition (FEBID/FIBID) has become one of the most promising approaches for the realization of two-and three-dimensional (3D) functional structures with particular relevance for the fields of nano-magnetism [1][2][3][4], nano-optics [5,6], and superconductivity of nanostructures [7,8]. This is due to essentially two important advantages that FEBID/FIBID have as compared to other technologies [9], which are their applicability on virtually any surface and the flexibility to fabricate wireframe- [3] as well as sheet-like [10] structures with sub-100 nm resolution. In order to fully develop the potential of FEBID/FIBID for the mentioned research areas, a reliable transfer of desired 3D structures into real 3D nano-objects is mandatory.…”

“…Over the last few years, this has led to the evolution of a simulation-guided 3D computer aided design (CAD) approach which was pioneered by Fowlkes and collaborators [11] and has been further developed towards a reliable instrument for 3D nano-fabrication even of complex nano-architectures, as was recently reviewed by Winkler et al [12]. For the fields of 3D nano-magnetism and nano-superconductivity, the precursors Co 2 (CO) 8 [1], Fe 2 (CO) 9 [13], HCo 3 Fe(CO) 12 [3] (FEBID), W(CO) 6 [14], and Nb(NMe 3 ) 2 (N-t-Bu) [7] (FIBID) have been used and proven to be particularly suited. With a view to the simulation-guided 3D CAD approach to nano-fabrication which uses the continuum model of FEBID/FIBID growth, a set of simulation parameters is required; see Reference [15] for a recent review.…”

Reactive molecular dynamics simulations of organometallic compound W(CO)6 fragmentation,

“…One of the technological applications of IDC is focused electron beam induced deposition (FEBID) -a novel and actively developing nanofabrication technique that allows controllable creation of metal nanostructures with nanometer resolution [9][10][11]. FEBID is based on the irradiation of organometallic precursor molecules by keV electron beams whilst they are being deposited on a substrate.…”

“…To date, a popular class of precursors for FEBID is metal carbonyls Me n (CO) m [12,13], which are composed of one or several metal atoms (Me) bound to a number of carbon monoxide ligands. Although such precursor molecules (for instance, W(CO) 6 , Fe(CO) 5 or Co 2 (CO) 8 ) were commonly adopted from the chemical vapor deposition method and thus were not specifically designed to be efficiently and completely dissociated under electron irra-diation, recent developments in optimization of the precursor deposition processes as well as the design of novel precursors for FEBID (e.g., HFeCo 3 (CO) 12 [14]) have made it possible to fabricate fully metallic structures made of Au, Pt, Fe, Co, Pb, and Co 3 Fe alloy [10].…”

Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

“…Several recent studies have demonstrated that focused electron beam induced processing (FEBIP) has high potential for the controlled bottom-up fabrication of metallic 3D nanostructures [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Furthermore, the basic processes during FEBIP are understood to more and more detail leading to developments towards more diverse, cleaner and more defined deposits for various potential applications [7,[15][16][17][18].…”