Focused Ion Beam Instruments

Bassim, Nabil; Notte, John

doi:10.31399/asm.hb.v10.a0006677

Materials Characterization 2019

DOI: 10.31399/asm.hb.v10.a0006677

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Focused Ion Beam Instruments

Nabil Bassim¹,

John Notte²

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2023

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Cited by 1 publication

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Roadmap for focused ion beam technologies

Höflich,

Hobler,

Allen

et al. 2023

Applied Physics Reviews

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The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

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Roadmap for focused ion beam technologies

Höflich,

Hobler,

Allen

et al. 2023

Applied Physics Reviews

View full text Add to dashboard Cite

show abstract

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Focused Ion Beam Instruments

Cited by 1 publication

References 112 publications

Roadmap for focused ion beam technologies

Roadmap for focused ion beam technologies

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