Focused Ion Beam Microscopy and Micromachining

Volkert, Cynthia A.; Minor, Alexander

doi:10.1557/mrs2007.62

Cited by 583 publications

(408 citation statements)

References 29 publications

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“…The most prevalent method to fabricate pillars is by focused ion beam (FIB) [1][2][3][4][5][6][7][8][9]14,[16][17][18][19][20][21][22][25][26][27]. Remarkably, at these length scales, face-centered cubic (fcc) metallic nanopillars exhibit a strong size-dependent strengthening: as the pillar diameter becomes smaller, its flow stress increases as a power law: / d Àn where d is the pillar diameter and n lies between 0.5 and 0.7 [1- 7,11,23,26].…”

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confidence: 99%

Microstructure versus Size: Mechanical Properties of Electroplated Single Crystalline Cu Nanopillars

2010

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We report results of uniaxial compression experiments on single-crystalline Cu nanopillars with nonzero initial dislocation densities produced without focused ion beam (FIB). Remarkably, we find the same power-law size-driven strengthening as FIB-fabricated face-centered cubic micropillars. TEM analysis reveals that initial dislocation density in our FIB-less pillars and those produced by FIB are on the order of 10 14 m À2 suggesting that mechanical response of nanoscale crystals is a stronger function of initial microstructure than of size regardless of fabrication method.

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confidence: 99%

Microstructure versus Size: Mechanical Properties of Electroplated Single Crystalline Cu Nanopillars

2010

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“…5,6 In a typical FIB system, Ga + ions are extracted from a liquid-metal ion source, accelerated to 30 keV, and focused by an electrostatic lens system to a spot size with diameter as small as 5 -10 nm.…”

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Surface plasmon polariton modes in a single-crystal Au nanoresonator fabricated using focused-ion-beam milling

Vesseur

Waele

Lezec

et al. 2008

Applied Physics Letters

110

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We use focused-ion-beam milling of a single-crystal Au surface to fabricate a 590-nm-long linear ridge that acts as a surface plasmon nanoresonator. Cathodoluminescence imaging spectroscopy is then used to excite and image surface plasmons on the ridge. Principal component analysis reveals distinct plasmonic modes, which proves confinement of surface plasmon oscillations to the ridge. Boundary-element-method calculations confirm that a linear ridge is able to support highly localized surface plasmon modes ͑mode diameter Ͻ100 nm͒. The results demonstrate that focused-ion-beam milling can be used in rapid prototyping of nanoscale single-crystal plasmonic components. © 2008 American Institute of Physics. ͓DOI: 10.1063/1.2885344͔ Surface plasmon polaritons ͑SPPs͒ are electromagnetic waves confined to a metal-dielectric interface. As shown in recent experiments, SPPs can be manipulated using waveguides 1,2 and resonators. 3,4 Surface plasmon polaritons hold promise for application in sensing, photovoltaics, telecommunications, and optoelectronic circuit integration due to their ability to concentrate and guide electromagnetic energy at the nanoscale.Fabrication of components that guide and confine SPPs involves structuring of metals, typically using methods such as electron beam lithography, nanoimprint lithography, selfassembly, or templating techniques. These methods offer high spatial resolution, but require complex multistep processing. Moreover, the metal films, most often obtained by thermal evaporation, typically have a polycrystalline structure. Grain boundaries and surface roughness in polycrystalline films are known to cause undesired scattering of SPPs.A single-step method to structure metals for plasmonic applications, that is gaining widespread acceptance, is focused-ion-beam ͑FIB͒ milling. 5,6 In a typical FIB system, Ga + ions are extracted from a liquid-metal ion source, accelerated to 30 keV, and focused by an electrostatic lens system to a spot size with diameter as small as 5 -10 nm.In this letter, we show how FIB milling of a singlecrystal Au substrate can be used for highly reproducible, maskless fabrication of a smooth plasmonic resonator, with minimum lateral dimension of 50 nm, and surface roughness on the scale of only a few nanometers. We use cathodoluminescence ͑CL͒ imaging spectroscopy to generate SPPs ͑Refs. 7 and 8͒ and image resonant modes within the metal nanostructures. The data demonstrate that FIB is an ideal tool for fabrication of nanoscale plasmonic components, in particular, when single-crystal metal substrates are employed. Our conclusions are supported by boundary-element-method ͑BEM͒ calculations of the local fields at the metal nanostructures. 9,10 Nanoplasmonic device fabrication consisted of focusedion-beam milling a polished ͗111͘ single-crystal Au substrate, grown using the Czochralski process. A 10 pA, 30 keV Ga beam from a FEI Nova 600 dual-beam workstation was rastered in 40 passes over a 4 ϫ 5 m 2 area, using a 1000ϫ 1250 pixel grid using a variable dwell time per pi...

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“…More details on the scanning electron microscopy, electron beam lithography and lift-off techniques are available in Refs [8,22,23,56].…”

Section: Methodsmentioning

confidence: 99%

Surface Morphology and Magnetic Properties of Isolated Cylindrical Nickel Nanowires

Sultan¹

2017

AJN

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Abstract:In this article, the surface morphology and magnetic properties of isolated cylindrical nickel (Ni) nanowires fabricated by electrodeposition have been thoroughly investigated using scanning electron microscopy and Magneto-Optical Kerr Effect (MOKE) magnetometry, respectively. The surfaces of most nanowires were found to be homogenous, uniform, and cylindrical in shape. Some others show different diameters and surface features, including; protrusions and branches along their length. The diameter distribution of a wide range of nanowires was found to differ from their template pore diameters. These all variations are more likely due to defects exist in the internal surfaces of the pores within the template itself, or may be associated with the trapped air pockets within the pores during nanowires growth or due to the oxide formation or residual contaminants which may cover these wires. The nanowires lengths were found to differ from their actual lengths estimated during deposition growth. This was attributed to the breakage of nanowires into small sections during releasing process. The hysteresis loops obtained by applying a magnetic field at different angles with respect to the nanowires long axis showed square hysteresis loops with a sharp jump of Kerr signal during switching behaviour, as well as a high squareness ratio, indicating the dominance of shape anisotropy. These results are quite different from the measurements of high density templated nanowires reported in the literature, due to the small number of nearest neighbour nanowires, and hence no magneto-static interaction. The magnetisation reversal of such wires is well described by the non-uniform rotation of the curling model of domain reversal.

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Focused Ion Beam Microscopy and Micromachining

Cited by 583 publications

References 29 publications

Microstructure versus Size: Mechanical Properties of Electroplated Single Crystalline Cu Nanopillars

Microstructure versus Size: Mechanical Properties of Electroplated Single Crystalline Cu Nanopillars

Surface plasmon polariton modes in a single-crystal Au nanoresonator fabricated using focused-ion-beam milling

Surface Morphology and Magnetic Properties of Isolated Cylindrical Nickel Nanowires

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