2001
DOI: 10.1063/1.1430028
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Focused ion beam modification of atomic force microscopy tips for near-field scanning optical microscopy

Abstract: A probe for near-field scanning optical microscopy is demonstrated based on a high index glass sphere attached to the end of a conventional atomic force microscopy tip. The sphere is machined into a pyramid geometry using a focused ion beam ͑FIB͒ instrument, coated with aluminum to confine the excitation light, and milled further with the FIB to open an aperture at the end of the tip. Near-field fluorescence images of 50 nm fluorescent latex spheres reveal subdiffraction limit spatial resolution, illustrating … Show more

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Cited by 16 publications
(19 citation statements)
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“…These have largely involved either changing the feedback mechanism utilized to hold the tip close to the sample or modifying the probes themselves to lower the spring constant and thus the forces generated in force feedback. 2,5,9 For the latter, an obvious route of exploration is to incorporate a near-field light source onto conventional atomic force microscopy ͑AFM͒ cantilevers.…”
Section: -5mentioning
confidence: 99%
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“…These have largely involved either changing the feedback mechanism utilized to hold the tip close to the sample or modifying the probes themselves to lower the spring constant and thus the forces generated in force feedback. 2,5,9 For the latter, an obvious route of exploration is to incorporate a near-field light source onto conventional atomic force microscopy ͑AFM͒ cantilevers.…”
Section: -5mentioning
confidence: 99%
“…These tips incorporate the well-known properties of fiber optic NSOM probes and are much less rigorous to fabricate than the previous hybrid design. 9 While still requiring access to FIB technology, the micromachining requirements are greatly relaxed since fabrication of the aperture itself is not required. Moreover, since these tips are designed around conventional fiber optic NSOM probes, they take advantage of the past work done in fabricating and understanding the optical properties of these tips.…”
mentioning
confidence: 99%
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