2006
DOI: 10.1002/jemt.20324
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Focused ion beams techniques for nanomaterials characterization

Abstract: Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis. In this article the merits of using these systems are discussed and the three main techniques used to prepare cross-section specimens for transmission electron microscopy (TEM) are both discussed and compared with emphasis being placed on the tricks that users do to make the lamellae as thin as possible and with a minimum of damage at their sidewalls. Other techniques such as… Show more

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Cited by 114 publications
(76 citation statements)
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“…The temperature at which the specimen is cut varied from −150 °C (ghosh et al, 2000) to −55 °C . Another recently developed method is the focused ion beam (FIB) technique, which allows very thin sections to be obtained and does not require embedding (Langford, 2006). Rapid freezing is also important for preserving the spatial integrity of samples.…”
Section: Sample Preparationmentioning
confidence: 99%
“…The temperature at which the specimen is cut varied from −150 °C (ghosh et al, 2000) to −55 °C . Another recently developed method is the focused ion beam (FIB) technique, which allows very thin sections to be obtained and does not require embedding (Langford, 2006). Rapid freezing is also important for preserving the spatial integrity of samples.…”
Section: Sample Preparationmentioning
confidence: 99%
“…And a Ga þ implantation and damage occurring in surface of the micropillar creates a damage layer with a thickness of 10-100 nm. 18,19) This damage layer may strengthen the specimen by restricting the emission of dislocation from the surface. 20,21) To evaluate the influence of this layer in the mechanical behavior of nc-Ni, chemical analysis of the longitudinal section of deformed nc-Ni is carried out.…”
Section: Discussionmentioning
confidence: 99%
“…This results in a roughness within the slice plane and thus slice milling with inconsistent thickness. This is particularly the case when the sample surface has a rough topography or the material contains phases with different densities [60,63]. This effect is greatly reduced by depositing a thick Pt layer on the top surface above the ROI by in situ FIB assisted deposition, followed by gentle ion milling (polishing using a relatively low ion beam).…”
Section: Tomography Setupmentioning
confidence: 99%