Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures

Späth, Andreas; Vollnhals, Florian; Tu, Fan; Richter, R.; Raabe, Jörg; Marbach, Hubertus; Fink, Rainer H. A.

doi:10.1017/s1431927618012965

Cited by 2 publications

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“…It has been confirmed by previous experiments that deposition rates in FXBID are influenced by the incident photon energy [21,22,47]. However, this effect has to be studied in more detail.…”

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confidence: 59%

“…Recent developments in X-ray optics have pushed this parameter below 10 nm [44,45]. Finally, STXM can be employed for an in-situ analysis of the metallic deposits directly after fabrication by means of resonant imaging and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy to evaluate confinement, growth rates, oxidation state and chemical purity [21,22,46,47]. X-ray magnetic circular dichroism (XMCD) can be used to characterize magnetic deposits with respect to their magnetization and coercivity [48].This review presents some basic principles of X-ray optics and X-ray microscopy as well as X-ray beam dosimetry that are relevant for FXBID experiments.…”

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confidence: 99%

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Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

Späth

2019

Micromachines

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Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL). The present setup is based on a scanning transmission X-ray microscope (STXM) equipped with a gas flow cell to provide metal organic precursor molecules towards the intended deposition zone. Fundamentals of X-ray microscopy instrumentation and X-ray radiation chemistry relevant for FXBID development are presented in a comprehensive form. Recently published proof-of-concept studies on initial experiments on FXBID nanolithography are reviewed for an overview on current progress and proposed advances of nanofabrication performance. Potential applications and advantages of FXBID are discussed with respect to competing electron/ion based techniques. polymer resulting in 3D patterning by radiation chemistry [33,34]. The approach is limited to materials with significantly different absorption cross-sections at the chosen incident photon energies, as in transmission geometry, all layers are exposed to the beam at different degrees of focusing. However, such experiments open a completely novel perspective for complex direct-write nanofabrication. It should be mentioned that during the late 1980s and early 1990s several groups attempted to exploit broad-band synchrotron light [38][39][40][41] as well as the monochromatic X-ray beam of a photon-induced scanning Auger microscope [42,43] for additive manufacturing of metal deposits from metal organic precursors. However, due to limited instrumental capabilities, only spatially extended thin films with an optimum of some 10 µm resolution could be produced [43].FXBID exploits the photon energy-selectivity of synchrotron-based XRL and extends it by the idea of depositing metal nanostructures from suitable precursor gases [21,22]. The use of a STXM setup for these experiments offers several advantages. STXM is a raster-scanning technique which avoids the necessity of shadow masks. According to comparable results from polymer lithography the theoretical minimum feature size of the deposited metal structures is mainly determined by the spot size of the incident beam [36,37]. Recent developments in X-ray optics have pushed this parameter below 10 nm [44,45]. Finally, STXM can be employed for an in-situ analysis of the metallic deposits directly after fabrication by means of resonant imaging and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy to evaluate confinement, growth rates, oxidation state and chemical purity [21,22,46,47]. X-ray magnetic circular dichroism (XMCD) can be used to characterize magnetic deposits with respect to their magnetization and coercivity [48].This review presents some basic principles of X-ray optics and X-ray microscopy as well as X-ray beam dosimetry that are relevant for FXBID experiments. In accordance, limitations, challenges and opportunities of additiv...

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confidence: 59%