We have fabricated (110) epitaxy YBa 2 Cu 3 O 7−δ (YBCO), PrBa 2 Cu 0.8 Al 0.2 O 7 (PB-CAO), PrBa 2 Cu 0.8 Ga 0.2 O 7−δ (PBCGO) nanometer-thin films and YBCO/PBCAO, YBCO/PBCGO multilayers of a variety of film thicknesses. Electrical resistivities measured from these systems were plotted against temperatures and film thicknesses and are presented in this paper. Superconducting onset temperature Tc of the YBCO films was estimated and plotted against YBCO film thickness. Superconducting coupling length was deduced. Finite size effect and 2D to 3D transition are also discussed.