Model inspections are important to ensure high‐quality software and to satisfy legal obligations in model‐based engineering processes. As model‐based specifications are typically documented on type‐level, errors concerning the interactions between multiple system instances can go unnoticed. For collaborative cyber‐physical systems (CPS), a plethora of possible instance‐level configurations need to be taken into account. Therefore, we propose the definition of instance‐level review diagrams that show representative interactions of instance‐level configurations that help detect defects in the system specification. To evaluate the approach, we conducted a controlled experiment whose results indicate that instance‐level review diagrams have—compared with type‐level diagrams—important positive effects on reviewing processes for behavioral specifications of CPS. Specifically, the experiment provides empirical evidence that instance‐level review diagrams are significantly more expressive and effective than type‐level diagrams.