2017
DOI: 10.1016/j.mssp.2016.10.024
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Formation and characterization of Ge 1−x−y Si x Sn y /Ge 1−x Sn x /Ge 1−x−y Si x Sn y double heterostructures with strain-controlled Ge 1−x−y Si x Sn y layers

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Cited by 12 publications
(13 citation statements)
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“…The incident electron beam was irradiated along the [ ] 110 direction. Also, RHEED patterns of a sample grown on un-implanted Ge(001) substrate are shown, which we previously reported for comparison 20) in Figs. 1(g)-1(i).…”
Section: Resultsmentioning
confidence: 80%
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“…The incident electron beam was irradiated along the [ ] 110 direction. Also, RHEED patterns of a sample grown on un-implanted Ge(001) substrate are shown, which we previously reported for comparison 20) in Figs. 1(g)-1(i).…”
Section: Resultsmentioning
confidence: 80%
“…In our previous study, Ge 1−x−y Si x Sn y /Ge 1−x−y Si x Sn y /Ge 1−x−y Si x Sn y double heterostructures grown on un-implanted Ge substrates were pseudomorphically grown on Ge and strain relaxation did not occur. 20) Considering this result, the strain relaxation of the 1st Ge 1−x−y Si x Sn y layer was promoted by defects near the surface of Ge substrate those were introduced with the ion implantation and not completely recovered by the annealing. This behavior is similar to the strain relaxation of a Si 1−x Ge x epitaxial layer grown on an ion-implanted Si substrate as mentioned in the previous report.…”
Section: Resultsmentioning
confidence: 97%
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“…because of their controllable lattice constants and band gaps depending on the Si, Ge, and Sn contents. 9,10) To realize the control of them independently, Si 1-x-y Ge x Sn y ternary alloys have been focused and studied widely by means of the molecular beam epitaxy (MBE) [11][12][13] and the chemical vapor deposition (CVD). 14,15) It is known that the low solid solubility limit of Sn into Si (∼0.1 at%) and Ge (∼1 at%) 16) requires the non-equilibrium formation of Sn containing group-IV alloys.…”
Section: Introductionmentioning
confidence: 99%
“…1,[3][4][5][6] This means that a quantum confinement structure suitable for device applications such as light-emitting diodes, semiconductor lasers, and high electron mobility transistors can be realized using only strain-free group-IV semiconductors. Several groups, including us, recently demonstrated the crystal growth of type-I band structures, specifically, Ge 1−x−y Si x Sn y /Ge junction, 7) Ge 1−x−y Si x Sn y /Ge 1−x Sn x / Ge 1−x−y Si x Sn y double heterojunctions, [8][9][10][11] and the multiquantum well. [12][13][14] They showed Ge 1−x−y Si x Sn y 's high potential for use in the cladding layers of lasers and resonant tunneling diodes.…”
Section: Introductionmentioning
confidence: 99%