Formation and Characterization of Hole Nanopattern on Photoresist Layer by Scanning Near-Field Optical Microscope

Roszkiewicz, Agata; Jain, Amrita; Teodorczyk, M.; Nasalski, W.

doi:10.3390/nano9101452

Cited by 9 publications

(3 citation statements)

References 41 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition to the laser properties, the spot size, the photoresist material, and the acceptable writing speed are also important requirements for creating a high fidelity pattern [ 42 ]. Despite the fact that this method can achieve finely patterned structures [ 43 , 44 ], there are cases in which the relief model is different from the design, which is inclusively due to mechanical instabilities and deformations caused by the processes of chemical development and drying or by the mechanical drifting of the focal spot position with respect to the sample [ 45 ]. However, recently, Yulianto et al have overcome some of these limitations by replacing the conventional live monitoring of patterns based on wide-field microscopy with a photoluminescence scanning method ( Figure 3 a).…”

Section: Top–down Lithographic Methodologiesmentioning

confidence: 99%

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Handrea-Dragan

Botiz

2021

Polymers

View full text Add to dashboard Cite

There is an astonishing number of optoelectronic, photonic, biological, sensing, or storage media devices, just to name a few, that rely on a variety of extraordinary periodic surface relief miniaturized patterns fabricated on polymer-covered rigid or flexible substrates. Even more extraordinary is that these surface relief patterns can be further filled, in a more or less ordered fashion, with various functional nanomaterials and thus can lead to the realization of more complex structured architectures. These architectures can serve as multifunctional platforms for the design and the development of a multitude of novel, better performing nanotechnological applications. In this work, we aim to provide an extensive overview on how multifunctional structured platforms can be fabricated by outlining not only the main polymer patterning methodologies but also by emphasizing various deposition methods that can guide different structures of functional nanomaterials into periodic surface relief patterns. Our aim is to provide the readers with a toolbox of the most suitable patterning and deposition methodologies that could be easily identified and further combined when the fabrication of novel structured platforms exhibiting interesting properties is targeted.

show abstract

Section: Top–down Lithographic Methodologiesmentioning

confidence: 99%

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Handrea-Dragan

Botiz

2021

Polymers

View full text Add to dashboard Cite

show abstract

“…A second general set of methods consists in aperture-less approaches, where the near-field light is emitted from the surface due to external illumination that is scattered off of a sharp tip to be detected likewise in the far-field [4]. The use of the same principle as the one for imaging structures with nanometer resolution, but for the modification of materials, has been demonstrated with different photosensitive materials, polymers, metals, and semiconductors, to name a few [60]. Here, when the near-field enhancement overcomes the required ablation fluence for a given material, it is possible to produce permanent modifications with nanometer resolution and high reproducibility.…”

Section: Plasmonic-based Approach: Snom Probesmentioning

confidence: 99%

Probing Light by Matter: Implications of Complex Illumination on Ultrafast Nanostructuring

Florian

Du²,

Arnold³

2023

Springer Series in Optical Sciences

View full text Add to dashboard Cite

Pushing the limits of precision and reproducibility in ultrafast laser-based nanostructuring requires detailed control over the properties of the illumination. Most traditional methods of laser-based manufacturing rely on the simplicity of Gaussian beams for their well-understood propagation behavior and ease of generation. However, a variety of benefits can be obtained by moving beyond Gaussian beams to single or multiple tailored beams working toward optimal spatial and temporal control over the beam profiles. In this chapter, we center our attention on methods to generate and manipulate complex light beams and the resulting material interactions that occur in response to irradiations with these non-traditional sources. We begin with a discussion on the main differences between Gaussian and more complex light profiles, describing the mechanisms of phase and spatial control before narrowing the discussion to approaches for spatial structuring associated with materials processing with ultrashort laser pulses. Such structuring can occur in both far-field propagating architectures, considering rapidly varying spatial profiles generated mechanically or optically, as well as near-field, non-propagating beams associated with plasmonic and dielectric systems. This chapter emphasizes some of the unique abilities of complex light to shape materials at the nanoscale from a fundamental perspective while referencing potential applications of such methods.

show abstract

“…What's more, the restriction of light by nanoscale apertures of SNOM tip provides immense potential to realize high-resolution lithography. Several lithography researches have been conducted on photoresists utilizing the conventional tapered optical fiber [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25]. The end of the fiber is a metal coated tapered tip, with a nanoscale aperture at the apex.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of nanostructure on Au nano-film by nanosecond laser coupled with cantilevered scanning near-field optical microscopy probe

WANG¹,

Cui²,

Yin³

et al. 2022

Nanotechnology

View full text Add to dashboard Cite

Diffraction limit has been the constraint of the nanostructure fabrication. Because the scanning near-field optical microscopy (SNOM) can work in the evanescent near-field region, its application in nano-processing has received extensive attention from researchers globally. In this paper, we combined nanosecond laser with cantilevered scanning near-field optical microscopy probe. Utilizing the high precision of the confinement and enhancement effect of probe tip and the high instantaneous energy of the laser, we realized nanostructure fabrication and in situ detection on Au nano-film. Feature sizes down to 47 nm full width at half maximum (FWHM) were fabricated. We investigated the laser propagation through the SNOM tip aperture and the light field intensity distribution on the surface of substrate theoretically. The calculation results demonstrate that the laser is highly restricted within the SNOM aperture and enhanced on the exit plane at the rim of aperture. After the transmission, the light field intensity distribution on the surface of the Au nano-film was enhanced due to the localized surface plasmon resonance (LSPR). The thermal distribution on the surface of Au nano-film indicates that the peak of the temperature distribution appeared at the surface right underneath the center of the aperture. It is proved that the simulation results are consistent with the experimental results.

show abstract

Formation and Characterization of Hole Nanopattern on Photoresist Layer by Scanning Near-Field Optical Microscope

Cited by 9 publications

References 41 publications

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Probing Light by Matter: Implications of Complex Illumination on Ultrafast Nanostructuring

Fabrication of nanostructure on Au nano-film by nanosecond laser coupled with cantilevered scanning near-field optical microscopy probe

Contact Info

Product

Resources

About