2014
DOI: 10.12693/aphyspola.125.1292
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Formation and Characterization of Nanostructured Composite Coatings Based on the TiN Phase

Abstract: Nanostructured thin-lm coatings based on titanium nitride, doped with silicon, chromium and aluminium were the object of this study. The creation of a smooth transition layer was carried out by the changing of a supplying nitrogen ow to the vacuum chamber during the application. TiSiN, TiCrN and TiAlN coatings were deposited. The studies of the structure, elemental and phase composition of the coatings were carried out. Also, the performance of coatings was investigated. The results can be used in today's tech… Show more

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Cited by 21 publications
(3 citation statements)
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“…The amount of nitrogen in the coatings is 50 at %. Consequently, stoichiometric titanium nitride TiN forms and the purely metallic phase is absent [11,12]. Moreover, the absence of carbon, oxygen, boron, and other impurities that can produce interstitial phases in metals suggests that 90-95% of octahedral pores in the crustal lattice are occupied by nitrogen atoms.…”
Section: Resultsmentioning
confidence: 99%
“…The amount of nitrogen in the coatings is 50 at %. Consequently, stoichiometric titanium nitride TiN forms and the purely metallic phase is absent [11,12]. Moreover, the absence of carbon, oxygen, boron, and other impurities that can produce interstitial phases in metals suggests that 90-95% of octahedral pores in the crustal lattice are occupied by nitrogen atoms.…”
Section: Resultsmentioning
confidence: 99%
“…Исследования таких покрытий на подложках различного типа интенсивно и широко ведутся различными коллективами и представлены в циклах работ Погребняка, Береснева, Колесникова и др. [6][7][8][9][10][11][12][13]. В этих исследованиях большой объем занимают работы по изучению свойств сверхтвердых наноструктурных покрытий нового типа на основе (Ti−Hf−Si)N и (Ti−Hf)N на подложках кремния и стали [8][9][10][11][12][13].…”
Section: Introductionunclassified
“…The results of fundamental research of these materials demonstrate a large number of various physical and chemical properties [11,14,15]. The influence of surface on material properties is studied in [16][17][18]. The negative capacitance [19] and the shape memory [20] effects of the nanostructured materials are known as well.…”
Section: Introductionmentioning
confidence: 99%