2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
DOI: 10.1109/memsys.2013.6474244
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Formation and curvature tuning of micro lens using surface tension and hydraulic pressure assisted molding process

Abstract: This study presents a novel concept for the formation of curvature micro lens and the lens-curvature tuning using the hydraulic pressure and surface tension assisted molding process. The liquid UV-curable polymer is defined by hydraulic pressure, surface tension, and molding, and then solidified by UV-light to form the micro-lens. Merits of the process technology are: (1) initial lens curvatures defined by the polymer volume and surface tension, (2) final lens curvature is tuned by the hydraulic pressure, and … Show more

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