Formation Mechanism of Passivation Layer under Air Exposure on TiZrV Non-Evaporable Getter Film
Qingzhi Shi,
Sihui Wang,
Shiyuan Shi
et al.
Abstract:Non-evaporable getter (NEG) films require thermal vacuum activation prior to their use in high vacuum environments. The degree of activation difficulty is influenced by the properties of the passivation layer, but there is limited information about its composition. The purpose of this study is to investigate the formation mechanism and clarify this issue. The film microstructure was investigated by scanning electron microscopy (SEM) and grazing incidence X-ray diffraction (GIXRD). The quantum chemical approach… Show more
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