We describe the fabrication and structure of nanoscale thin films of β phase shape memory alloys with the nominal atomic stoichiometry Au 7 Cu 5 Al 4 (corresponding to 5.8 wt% Al). These alloys possess properties that suggest they could be used in nanoscale actuators. The films described here are between 20 and 50 nm thick which is below the thickness at which some other shape memory alloys cease to transform. However, microstructural and X-ray studies confirm that the coatings still exhibit the displacive transformations that are a prerequisite for the shape memory effect.