2013
DOI: 10.1016/j.tsf.2012.08.062
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Formation of (113) texture in fcc nitride thin films and its influence on the film properties

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Cited by 8 publications
(7 citation statements)
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“…In our study, the off-axis tilt of c-200 texture cannot be attributed to the oblique incidence of metal vapours toward the substrate, as previously argued [27,28,36], because perfect alignment of c-200 texture along the GD is observed with film deposited at the same geometrical configuration (i.e., 35° inclination angle), but at a relatively lower Ts of 250 °C. Our in-situ stress analysis (see Figure 5 (a-d)) revealed that the stress level in films is also not responsible for the tilt of the c-200 texture as proposed by Falub et al [17] and Karimi et al [34]. The Al0.50Ti0.50N thin film deposited at Ts = 250 °C shows high stress state (see Figure 5 (a)), but the c-200 planes are perfectly textured along the GD.…”
Section: Resultssupporting
confidence: 66%
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“…In our study, the off-axis tilt of c-200 texture cannot be attributed to the oblique incidence of metal vapours toward the substrate, as previously argued [27,28,36], because perfect alignment of c-200 texture along the GD is observed with film deposited at the same geometrical configuration (i.e., 35° inclination angle), but at a relatively lower Ts of 250 °C. Our in-situ stress analysis (see Figure 5 (a-d)) revealed that the stress level in films is also not responsible for the tilt of the c-200 texture as proposed by Falub et al [17] and Karimi et al [34]. The Al0.50Ti0.50N thin film deposited at Ts = 250 °C shows high stress state (see Figure 5 (a)), but the c-200 planes are perfectly textured along the GD.…”
Section: Resultssupporting
confidence: 66%
“…Between films deposited at Ts = 450 °C and 600 °C, the latter shows a lower stress (Figure 5 (b-c)) and a higher offaxis tilt angle of c-200 than the former ones, contradicting the predictions by Falub et al [17] and Karimi et al [34]. A consistent increase in tilt angle with an increase in substrate temperature is also in contradiction to the model proposed by Karimi et al [34].…”
Section: Resultsmentioning
confidence: 55%
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“…Commonly, Ti 1-x Al x N coatings deposited by physical vapor deposition exhibit a fiber texture with a preferred orientation that may be controlled by, e.g., the bias or the film thickness [27][28][29][30][31][32]. This preferred orientation is one of the factors determining the cutting behavior due to the anisotropic elastic properties of Ti 1-x Al x N [12] and we have earlier shown [33] a strong alignment of the spinodally decomposed domains along the elastically softer <100> directions.…”
Section: Introductionmentioning
confidence: 99%
“…The change in bias to -70 V increases the ion energy during bombardment which results in a larger probability for re-nucleation of new grains and thus a smaller grain size [62]. In general, PVD grown TiAlN exhibits a fiber texture with a preferred orientation controlled by the bias or coating thickness [63][64][65][66][67][68]. This is exemplified in Figure 6 From the -2 diffractogram, the preferred orientation can be described by the texture coefficient, TC, which is defined in Eq.…”
Section: Coating Growthmentioning
confidence: 99%