2015
DOI: 10.1109/jphotov.2014.2364117
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Formation of Ag/Al Screen-Printing Contacts on B Emitters

Abstract: Abstract-In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr 3 -based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted.

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Cited by 49 publications
(34 citation statements)
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“…The bright layer on top of the Ag crystal is a residual SiO x protection layer. Inclusions with bright contrast, similar to the ones found in the Ag/Al phase of the bulk contact in [11], can be seen in the Ag/Al crystal. TEM EDX measurements reveal that these inclusions consist of at least 98 at% Si as can be seen in the spectrum in Fig.…”
Section: A Wafer With Sin X :H Layersupporting
confidence: 57%
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“…The bright layer on top of the Ag crystal is a residual SiO x protection layer. Inclusions with bright contrast, similar to the ones found in the Ag/Al phase of the bulk contact in [11], can be seen in the Ag/Al crystal. TEM EDX measurements reveal that these inclusions consist of at least 98 at% Si as can be seen in the spectrum in Fig.…”
Section: A Wafer With Sin X :H Layersupporting
confidence: 57%
“…Al particles with a size of some micrometers are randomly located in the paste. As explained in [11], these particles melt and dissolve the surrounding Ag. Where this Ag/Al phase gets in contact with the Si surface, Ag/Al spikes can be found after cooling down the wafers.…”
Section: A Wafer With Sin X :H Layermentioning
confidence: 95%
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