Formation of an Au membrane incorporated with carbon atoms under electron beam irradiations

Choi, Seong Soo; Park, Myoung Jin; Han, Chul Hee; Oh, Sae-Joong; Yamaguchi, Tokutaro; Park, Nam Kyou; Yoo, Jung Ho; Park, Kyoung-Jin; Kim, Yong−Sang

doi:10.1016/j.surfcoat.2016.05.030

Cited by 17 publications

(20 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Utilizing the state-of-art IC technology, the optical nanoslits or nano-apertures can be an excellent candidate for the next generation single molecule sensor. However, the tiny nano-aperture with its diameter of ~ 10 nm or less would have negligible optical transmission from Bethe's law; T ~ (d/) 4 . Therefore, enhancement of optical intensity should be required either by providing the groove patterns or periodic arrays, or plasmonic hot spot [2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

“…However, the tiny nano-aperture with its diameter of ~ 10 nm or less would have negligible optical transmission from Bethe's law; T ~ (d/) 4 . Therefore, enhancement of optical intensity should be required either by providing the groove patterns or periodic arrays, or plasmonic hot spot [2][3][4][5]. The portable optical detection device for single molecule analysis by using a nanoscale aperture or the nanopore with a ~10 nm diameter or less has yet to be fabricated.…”

Section: Introductionmentioning

confidence: 99%

“…We previously reported fabrication of the nano-aperture surrounded by the periodic patterns on pyramidal probes to improve the low transmittance of light through the nanosize aperture [3][4][5]. The pyramidal nano-aperture has been found to provide excellent light confinement inside a V-shaped cavity, and an enhanced optical throughput via cavity resonance and nanofocusing [6,7].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Fabrication of Various Plasmonic Nano-aperture Platforms with a ~10 nm Width

Choi¹,

Kim²,

Park³

et al. 2020

Preprint

Self Cite

View full text Add to dashboard Cite

We fabricated the nano-aperture plasmonic platforms for single molecule detection and other various applications such as infrared thermal emission device. The nano-apertures including the nanopores on the pyramid, and the nano-slits on the Au flat membrane were fabricated using a Ga ion focused ion beam drilling technique, followed by high energy electron beam irradiations dependent upon the electron beam current density. The nanopores with a few nanometer size and the nanoslit array with order of ~ 100 nm width were fabricated. Optical characteristics for the various nanoslits were examined dependent upon the slit opening width and sample thickness. The broad emission spectra from the (7x 7) slit array are obtained from spp-mediated emission in the visible and infrared region. A sharp strong infrared emission peak is also obtained due to Au nanoparticle. The fabricated Au platform can be utilized as single molecule sensor and infrared thermal emission device.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication of Various Plasmonic Nano-aperture Platforms with a ~10 nm Width

Choi¹,

Kim²,

Park³

et al. 2020

Preprint

Self Cite

View full text Add to dashboard Cite

show abstract

“…We reported previously the fabrication of nanopore on the electron beam induced Au-C binary mixture membrane. [9][10][11][12] We reported that diffusion of Au and C under the electron beam irradiations would occur and forms the binary mixture membrane with Au and C atoms. Furthermore, when the samples irradiated by the electron beam were stored for one year in a room environment, Au clusters on the diffused membrane were growing via Ostwald ripening.…”

Section: Introductionmentioning

confidence: 99%

“…36,37 Au cluster formation and island formation on the amorphous carbon film has also been reported after the sample was stored under room temperature for a few months or more. 10,32 However, when Au atoms smaller than 1 nm are deposited on the amorphous carbon, imaging of Au atoms was not possible due to low contrast on the amorphous substrate by TEM. During a sample storage period for several months under a room environment, small Au particles condense into larger particles.…”

Section: Introductionmentioning

confidence: 99%

Au cluster formation on a pore containing membrane under the various surface treatments

Choi

Han

et al. 2017

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

View full text Add to dashboard Cite

In this report, the authors will investigate the formation of Au clusters on the nanoscale membrane formed during various surface treatments such as electron beam irradiations, Ga ion focused ion beam (FIB) technique, and thermal treatment. Nanoapertures on the freestanding Au film were fabricated by using FIB technique, and a nanometer scale membrane created in the aperture by various surface treatments. Transmission electron microscopy reveals that Au clusters has formed on the membrane after the sample storage at room temperature for several months. In addition, Au clusters on the carbon-containing membrane were also observed after surface treatments of Ga ion beam etching, and thermal heating of freestanding 40 nm thick Au film at temperatures ranging from 400 to 800 C. Spinodal decomposition, spinodal dewetting, and coalescence of the Au particles on the carbon-containing membrane were also observed. V

show abstract

Plasmonic Nanopore with Nanopattern and Nanoparticles for Single Molecule Analysis

Choi

Park

et al. 2017

Physica Status Solidi (a)

Self Cite

View full text Add to dashboard Cite

In this report, the nano-hole on the electron beam induced membrane surrounded by periodic groove patterns are fabricated by focused ion beam technique (FIB), field emission scanning electron microscopy (FESEM), and transmission electron microscopy (TEM). Initially, a %200 nm thick Au films was deposited on the microfabricated pyramid, or on the flat plate by using a sputter-deposition technique. Nano-pore formation inside the FIB drilled Au aperture was controlled down to a few nanometer by using electron beam irradiations. Periodic patterns would enhance the optical intensity through the nano-aperture. Au particles were formed on the membrane several months after electron beam irradiations. In addition, surface plasmonenhanced Raman spectroscopy measurements were performed and the greatest optical intensity from on the pyramidal aperture surrounded with the nanopattern was measured. Fabricated plasmonic pore-device can be utilized as a next generation optical sensor for single molecule analysis. TEM images of the fabricated nanopore surrounded by periodic patterns on the plate are presented with electron beam profile on the detector.

show abstract

Formation of an Au membrane incorporated with carbon atoms under electron beam irradiations

Cited by 17 publications

References 28 publications

Fabrication of Various Plasmonic Nano-aperture Platforms with a ~10 nm Width

Fabrication of Various Plasmonic Nano-aperture Platforms with a ~10 nm Width

Au cluster formation on a pore containing membrane under the various surface treatments

Plasmonic Nanopore with Nanopattern and Nanoparticles for Single Molecule Analysis

Contact Info

Product

Resources

About