2008
DOI: 10.1166/jnn.2008.1100
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Formation of Copper Based Nanoparticles Embedded in a Relatively Thick Polyimide Film by Thermal Curing in Reducing Atmosphere

Abstract: We investigated the formation of nanoparticles in a relatively thick polyimide (PI) film (> 1 microm) in controlled atmospheres and optical properties of these nanoparticles. Polyamic acid of 10 wt% BPDA-PDA was spin-coated on the 25 nm Cu thin film and thermally cured at 350 degrees C in high purity nitrogen or 5% H2 + 95% N2 atmosphere. The fabricated nanoparticles in high purity nitrogen atmosphere had spherical shape and were dispersed in the 1.5 microm thick PI film. Its phase was revealed as Cu and Cupro… Show more

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Cited by 5 publications
(4 citation statements)
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“…The nanoparticles have difficulty diffusing or aggregating as they become bigger. The phase of the nanoparticles depends on the curing atmosphere [30,34]. Cu 2 O nanoparticles are formed during post-heat treatment in an oxidizing atmosphere since Cu nanoparticles reacted with oxygen ions diffusing from the atmosphere, which matched well with our previous results [31].…”
Section: Resultssupporting
confidence: 88%
See 1 more Smart Citation
“…The nanoparticles have difficulty diffusing or aggregating as they become bigger. The phase of the nanoparticles depends on the curing atmosphere [30,34]. Cu 2 O nanoparticles are formed during post-heat treatment in an oxidizing atmosphere since Cu nanoparticles reacted with oxygen ions diffusing from the atmosphere, which matched well with our previous results [31].…”
Section: Resultssupporting
confidence: 88%
“…In this method, polyamic acid (PAA) is spin-coated onto a metal film, and the metal film starts to be dissolved into PAA, forming a PAAmetal complex. During the imidization of PAA to PI, metal ions are rejected from the PAA-metal complex, accompanying nanoparticle formation [27][28][29][30][31][32][33][34][35]. Cu or Cu 2 O nanoparticles can be fabricated at high density in various PI films using the above method [27,29,35].…”
Section: Introductionmentioning
confidence: 99%
“…20 Our XRD result is similar to our previous result. 21 During the imidization process, the Cu ions rejected from Cu-PAA complex and formed aggregation as the shape of nano-size particles. 22 The post heattreatment in an oxidizing atmosphere transformed metallic Cu nanoparticles to two different metal-oxide phases depending on the temperature of the post heat-treatment.…”
Section: X-ray Diffractionmentioning
confidence: 99%
“…These peaks originated from the Cu nanoparticles formed in the PI film during the curing process in a reducing atmosphere, and the XRD pattern matched well with our previous results. 18 After curing in a reducing atmosphere, only the metallic Cu (111) and Cu (200) peaks were observed. The peaks related to the Cu oxide did not appear because hydrogen diffused into the PI and reduced the particles to a Cu phase.…”
Section: X-ray Diffraction Measurement Resultsmentioning
confidence: 98%