Formation of copper porous structures under near-equilibrium chemical vapor deposition

Abstract

a b s t r a c tThe mechanism of copper structure formation under near-equilibrium conditions in a chemically-active medium-condensate system has been investigated. The desired conditions have been implemented using CVD system. Copper chloride CuCl 2 was used as a source material, and mixture of hydrogen with nitrogen served as a working gas. The influence of the evaporation temperature, condensation temperature and state of the growth surface on the porous structures formation has been investigated. It has been established, that the structure formation mechanism is determined by layer-by-layer or normal crystal growth, nucleation and growth of whiskers, and also by partial intergrowth of structural elements.

Noise induced effects at nano-structured thin films growth during deposition in plasma-condensate devices

“…Therefore, from the data for linear size of the spherically shaped adsorbate islands shown in figure 12 b, one has R ∈ (28 ÷ 35) nm on the approximately half-height of the multi-layer system. These results correspond well with experimentally observed data for nano-structured thin films growth at condensation [54][55][56][57].…”

Influence of Adatoms Diffusion Between Layers on Structurization of Growing Thin Film during Condensation

“…Розглядаючи більш загальну модель росту багатошарових наноструктурованих плівок при конденсації, слід враховувати наявність принаймні другого шару з ненульовою концентрацією адсорбату. При цьому, відповідно до принципу мінімізації поверхневої енергії, концентрація адсорбату на шарі буде зменшуватися з ростом номеру шару, забезпечуючи зростання багатошарових пірамідально-подібних структур з терасами [38,39]; ширина тераси визначається властивостями осаджуваного матеріалу.…”

Influence of Spatial Inhomogeneity on the Formation of Chaotic Modes at the Self-Organization Process

“…The procedure for the spectral density calculation, which was described above, makes it possible to find the function ( ) that coincides with definition (22). The analysis of the function ( ) is a modern and very wide-spread method to examine rough fractal surfaces, which are very often formed in various experiments (see, e.g., works [30][31][32]) owing to internal self-organization processes. If a surface possesses fractal properties, then, with the help of the formula [21]…”