Formation of cubic-A1N in TiN/A1N superlattice

Setoyama, Makoto; Nakayama, Akira; Tanaka, Masato; Kitagawa, N.; Nomura, T.

doi:10.1016/s0257-8972(96)03033-2

Cited by 152 publications

(65 citation statements)

References 4 publications

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“…Recent advances in coating technologies permit the deposition of multilayers with superior chemical and mechanical properties using PVD and plasma-assisted PVD [386]. Typical examples of these multilayered structures include Al/Cu, Al/Ag [445,446], TiN/AlN [447], TiN/VN [448], TiN/NbN [449,450]. The hardness of TiN/VN and TiN/NbN coatings exceeds 50 GPa when the superlattice bilayer period is around 5 nm.…”

Section: Superhard and Super-tough Nanocrystalline Coatingsmentioning

confidence: 99%

Nanocrystalline materials and coatings

Tjong

Chen

2004

Materials Science and Engineering: R: Reports

842

345

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In recent years, near-nano (submicron) and nanostructured materials have attracted increasingly more attention from the materials community. Nanocrystalline materials are characterized by a microstructural length or grain size of up to about 100 nm. Materials having grain size of $0.1 to 0.3 mm are classified as submicron materials. Nanocrystalline materials exhibit various shapes or forms, and possess unique chemical, physical or mechanical properties. When the grain size is below a critical value ($10-20 nm), more than 50 vol.% of atoms is associated with grain boundaries or interfacial boundaries. In this respect, dislocation pile-ups cannot form, and the Hall-Petch relationship for conventional coarse-grained materials is no longer valid. Therefore, grain boundaries play a major role in the deformation of nanocrystalline materials. Nanocrystalline materials exhibit creep and super plasticity at lower temperatures than conventional micro-grained counterparts. Similarly, plastic deformation of nanocrystalline coatings is considered to be associated with grain boundary sliding assisted by grain boundary diffusion or rotation. In this review paper, current developments in fabrication, microstructure, physical and mechanical properties of nanocrystalline materials and coatings will be addressed. Particular attention is paid to the properties of transition metal nitride nanocrystalline films formed by ion beam assisted deposition process. #

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Section: Superhard and Super-tough Nanocrystalline Coatingsmentioning

confidence: 99%

Nanocrystalline materials and coatings

Tjong

Chen

2004

Materials Science and Engineering: R: Reports

842

345

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“…While nitrides of single elements are studied well enough, their multilayer modifications need study that is more detailed [26][27][28][29][30][31][32][33][34][35]. Therefore, the study of features of structure, elemental and phase composition of multilayer coatings depending on the deposition conditions is an important task in solid-state physics and materials science [36][37][38][39][40][41][42][43][44][45][46][47][48][49][50][51].…”

Section: Introductionmentioning

confidence: 99%

Arc-Evaporated Nanoscale Multilayer Nitride-Based Coatings for Protection Against Wear, Corrosion, and Oxidation

2016

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The studies of the structure and properties of nanoscale multilayer coatings based on the nitrides of refractory metals are summarized in a brief review. By the example of TiN/MoN, TiN/ZrN, CrN/MoN, and more complex (multilayer) (TiZrNbTaHf)N/WN:(TiZrNbTaHf)N/MoN obtained by vacuum-arc deposition of cathode, the dependences of their hardness, wear resistance, friction, corrosion, and oxidation on conditions of the deposition and layers' thickness are investigated and analysed. The regularities of the structure and behaviour properties of such nanoscale multilayer coatings depending on the size of nanograins, textures, and stresses arising in these coatings are described.У короткому огляді узагальнено результати досліджень структури та влас-тивостей наномасштабних багатошарових покриттів нітридів тяжкотоп-ких металів. На прикладі TiN/MoN-, TiN/ZrN-, CrN/MoN-та більш склад-них (багатошарових) (TiZrNbTaHf)N/WN:(TiZrNbTaHf)N/MoN-покриттів, одержаних методою вакуумно-дугового осадження катоду, досліджено та проаналізовано залежності їх твердости, зносостійкости, тертя, корозії й окиснення від умов осадження та товщини шарів. Відмічено закономірнос-ті структури та властивостей поведінки даних наномасштабних багатоша-рових покриттів від розміру нанозерен, текстури та напруг, що виникають у цих покриттях.В кратком обзоре обобщены результаты исследований структуры и свойств наномасштабных многослойных покрытий нитридов тугоплавких метал-лов. На примере TiN/MoN-, TiN/ZrN-, CrN/MoN-и более сложных (много-

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“…The issues in achieving larger thicknesses using sputtering include the difficulty in keeping the multilayer periodicity through the entire coating, due to target poisoning. Many authors have studied the relationship between structure and mechanical properties of different PVD sputtered multilayer coatings with typical thickness between 2-5 µm, relating such properties to the periodicity (Ʌ) and the interface morphology 12,[16][17][18] . Hovsepian et al [19][20][21] , Munz et al 9,12 and Tomlinson et al 14 have reported the characterization of multilayer CrN/ NbN coatings, particularly pointing out the advantages of using arc bond sputtering (ABS).…”

Section: Introductionmentioning

confidence: 99%

Thick CrN/NbN Multilayer Coating Deposited by Cathodic Arc Technique

et al. 2016

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The production of tribological nanoscale multilayer CrN/NbN coatings up to 6 μm thick by Sputtering/HIPIMS has been reported in literature. However, high demanding applications, such as internal combustion engine parts, need thicker coatings (>30 µm). The production of such parts by sputtering would be economically restrictive due to low deposition rates. In this work, nanoscale multilayer CrN/NbN coatings were produced in a high-deposition rate, industrial-size, Cathodic Arc Physical Vapor Deposition (ARC-PVD) chamber, containing three cathodes in alternate positions (Cr/ Nb/Cr). Four 30 μm thick NbN/CrN multilayer coatings with different periodicities (20, 10, 7.5 and 4 nm) were produced. The coatings were characterized by X-Ray Diffraction (XRD) and Transmission Electron Microscopy (TEM). The multilayer coating system was composed of alternate cubic rocksalt CrN and NbN layers, coherently strained due to lattice mismatch. The film grew with columnar morphology through the entire stratified structure. The periodicities adopted were maintained throughout the entire coating. The 20 nm periodicity coating showed separate NbN and CrN peaks in the XRD patterns, while for the lower periodicity (≤10nm) coatings, just one intermediate lattice (d-spacing) was detected. An almost linear increase of hardness with decreasing bilayer period indicates that interfacial effects can dominate the hardening mechanisms.

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Formation of cubic-A1N in TiN/A1N superlattice

Cited by 152 publications

References 4 publications

Nanocrystalline materials and coatings

Nanocrystalline materials and coatings

Arc-Evaporated Nanoscale Multilayer Nitride-Based Coatings for Protection Against Wear, Corrosion, and Oxidation

Thick CrN/NbN Multilayer Coating Deposited by Cathodic Arc Technique

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