Formation of Defects Forming Deep Levels in SiON/AlGaN/GaN Structures

Enisherlova, K. L.; Mikhaylov, I. A.; Seidman, L. A.; Kirilenko, E. P.; Kolkovsky, Yu. V.

doi:10.1134/s1063739723080085

Russ Microelectron

2023

DOI: 10.1134/s1063739723080085

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Formation of Defects Forming Deep Levels in SiON/AlGaN/GaN Structures

K. L. Enisherlova,

I. A. Mikhaylov,

L. A. Seidman

et al.

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Formation of Defects Forming Deep Levels in SiON/AlGaN/GaN Structures

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References 16 publications

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